Next Article in Journal
Sensored Field Oriented Control of a Robust Induction Motor Drive Using a Novel Boundary Layer Fuzzy Controller
Previous Article in Journal
Fall Risk Assessment and Early-Warning for Toddler Behaviors at Home
Article Menu

Export Article

Open AccessArticle
Sensors 2013, 13(12), 17006-17024; doi:10.3390/s131217006

A Micromachined Pressure Sensor with Integrated Resonator Operating at Atmospheric Pressure

1
Key Laboratory of Micro/Nano Systems for Aerospace, Ministry of Education, Northwestern Polytechnical University, Xi'an 710072, China
2
Shaanxi Province Key Laboratory of Micro and Nano Electro-Mechanical Systems, Northwestern Polytechnical University, Xi'an 710072, China
*
Author to whom correspondence should be addressed.
Received: 20 September 2013 / Revised: 19 November 2013 / Accepted: 28 November 2013 / Published: 10 December 2013
(This article belongs to the Section Physical Sensors)
View Full-Text   |   Download PDF [1545 KB, uploaded 21 June 2014]   |  

Abstract

A novel resonant pressure sensor with an improved micromechanical double-ended tuning fork resonator packaged in dry air at atmospheric pressure is presented. The resonator is electrostatically driven and capacitively detected, and the sensor is designed to realize a low cost resonant pressure sensor with medium accuracy. Various damping mechanisms in a resonator that is vibrating at atmospheric pressure are analyzed in detail, and a formula is developed to predict the overall quality factor. A trade-off has been reached between the quality factor, stress sensitivity and drive capability of the resonator. Furthermore, differential sense elements and the method of electromechanical amplitude modulation are used for capacitive detection to obtain a large signal-to-noise ratio. The prototype sensor chip is successfully fabricated using a micromachining process based on a commercially available silicon-on-insulator wafer and is hermetically encapsulated in a custom 16-pin Kovar package. Preliminary measurements show that the fundamental frequency of the resonant pressure sensor is approximately 34.55 kHz with a pressure sensitivity of 20.77 Hz/kPa. Over the full scale pressure range of 100–400 kPa and the whole temperature range of −20–60 °C, high quality factors from 1,146 to 1,772 are obtained. The characterization of the prototype sensor reveals the feasibility of a resonant pressure sensor packaged at atmospheric pressure. View Full-Text
Keywords: pressure sensor; resonant sensor; micromachining; micro resonator; atmospheric pressure; quality factor pressure sensor; resonant sensor; micromachining; micro resonator; atmospheric pressure; quality factor
Figures

This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

Scifeed alert for new publications

Never miss any articles matching your research from any publisher
  • Get alerts for new papers matching your research
  • Find out the new papers from selected authors
  • Updated daily for 49'000+ journals and 6000+ publishers
  • Define your Scifeed now

SciFeed Share & Cite This Article

MDPI and ACS Style

Ren, S.; Yuan, W.; Qiao, D.; Deng, J.; Sun, X. A Micromachined Pressure Sensor with Integrated Resonator Operating at Atmospheric Pressure. Sensors 2013, 13, 17006-17024.

Show more citation formats Show less citations formats

Related Articles

Article Metrics

Article Access Statistics

1

Comments

[Return to top]
Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top