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Sensors 2012, 12(9), 11592-11600; doi:10.3390/s120911592
Article
A Fully Integrated Humidity Sensor System-on-Chip Fabricated by Micro-Stamping Technology
Graduate Institute of Electronics Engineering, National Taiwan University, Taipei 10617, Taiwan
* Author to whom correspondence should be addressed.
Received: 27 July 2012; in revised form: 17 August 2012 / Accepted: 24 August 2012 / Published: 27 August 2012
(This article belongs to the Special Issue Ultra-Small Sensor Systems and Components)
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Abstract: A fully integrated humidity sensor chip was designed, implemented, and tested. Utilizing the micro-stamping technology, the pseudo-3D sensor system-on-chip (SSoC) architecture can be implemented by stacking sensing materials directly on the top of a CMOS-fabricated chip. The fabricated sensor system-on-chip (2.28 mm × 2.48 mm) integrated a humidity sensor, an interface circuit, a digital controller, and an On-Off Keying (OOK) wireless transceiver. With low power consumption, i.e., 750 μW without RF operation, the sensitivity of developed sensor chip was experimentally verified in the relative humidity (RH) range from 32% to 60%. The response time of the chip was also experimentally verified to be within 5 seconds from RH 36% to RH 64%. As a consequence, the implemented humidity SSoC paves the way toward the an ultra-small sensor system for various applications.
Keywords: humidity sensor chip; sensor system-on-chip; polyaniline; micro-stamping process
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MDPI and ACS Style
Huang, C.-W.; Huang, Y.-J.; Lu, S.-S.; Lin, C.-T. A Fully Integrated Humidity Sensor System-on-Chip Fabricated by Micro-Stamping Technology. Sensors 2012, 12, 11592-11600.
AMA StyleHuang C-W, Huang Y-J, Lu S-S, Lin C-T. A Fully Integrated Humidity Sensor System-on-Chip Fabricated by Micro-Stamping Technology. Sensors. 2012; 12(9):11592-11600.
Chicago/Turabian StyleHuang, Che-Wei; Huang, Yu-Jie; Lu, Shey-Shi; Lin, Chih-Ting. 2012. "A Fully Integrated Humidity Sensor System-on-Chip Fabricated by Micro-Stamping Technology." Sensors 12, no. 9: 11592-11600.