Next Article in Journal
Next Article in Special Issue
Previous Article in Journal
Previous Article in Special Issue
Sensors 2012, 12(9), 11592-11600; doi:10.3390/s120911592
Article

A Fully Integrated Humidity Sensor System-on-Chip Fabricated by Micro-Stamping Technology

,
,
 and *
Received: 27 July 2012; in revised form: 17 August 2012 / Accepted: 24 August 2012 / Published: 27 August 2012
(This article belongs to the Special Issue Ultra-Small Sensor Systems and Components)
View Full-Text   |   Download PDF [942 KB, uploaded 21 June 2014]   |   Browse Figures
Abstract: A fully integrated humidity sensor chip was designed, implemented, and tested. Utilizing the micro-stamping technology, the pseudo-3D sensor system-on-chip (SSoC) architecture can be implemented by stacking sensing materials directly on the top of a CMOS-fabricated chip. The fabricated sensor system-on-chip (2.28 mm × 2.48 mm) integrated a humidity sensor, an interface circuit, a digital controller, and an On-Off Keying (OOK) wireless transceiver. With low power consumption, i.e., 750 μW without RF operation, the sensitivity of developed sensor chip was experimentally verified in the relative humidity (RH) range from 32% to 60%. The response time of the chip was also experimentally verified to be within 5 seconds from RH 36% to RH 64%. As a consequence, the implemented humidity SSoC paves the way toward the an ultra-small sensor system for various applications.
Keywords: humidity sensor chip; sensor system-on-chip; polyaniline; micro-stamping process humidity sensor chip; sensor system-on-chip; polyaniline; micro-stamping process
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Export to BibTeX |
EndNote


MDPI and ACS Style

Huang, C.-W.; Huang, Y.-J.; Lu, S.-S.; Lin, C.-T. A Fully Integrated Humidity Sensor System-on-Chip Fabricated by Micro-Stamping Technology. Sensors 2012, 12, 11592-11600.

AMA Style

Huang C-W, Huang Y-J, Lu S-S, Lin C-T. A Fully Integrated Humidity Sensor System-on-Chip Fabricated by Micro-Stamping Technology. Sensors. 2012; 12(9):11592-11600.

Chicago/Turabian Style

Huang, Che-Wei; Huang, Yu-Jie; Lu, Shey-Shi; Lin, Chih-Ting. 2012. "A Fully Integrated Humidity Sensor System-on-Chip Fabricated by Micro-Stamping Technology." Sensors 12, no. 9: 11592-11600.



Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert