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Sensors 2012, 12(4), 5105-5115; doi:10.3390/s120405105
Article
Humidity-Induced Charge Leakage and Field Attenuation in Electric Field Microsensors
Haiyan Zhang 1,2 
, Dongming Fang 1 , Pengfei Yang 1,2 , Chunrong Peng 1 , Xiaolong Wen 1,2 and Shanhong Xia 1,*
, Dongming Fang 1 , Pengfei Yang 1,2 , Chunrong Peng 1 , Xiaolong Wen 1,2 and Shanhong Xia 1,*
1
State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China
2
Graduate School of the Chinese Academy of Sciences, Beijing 100049, China
* Author to whom correspondence should be addressed.
Received: 15 March 2012; in revised form: 6 April 2012 / Accepted: 9 April 2012 / Published: 19 April 2012
(This article belongs to the Special Issue Ultra-Small Sensor Systems and Components)
Download PDF Full-Text [501 KB, uploaded 19 April 2012 10:00 CEST]
Abstract: The steady-state zero output of static electric field measuring systems often fluctuates, which is caused mainly by the finite leakage resistance of the water film on the surface of the electric field microsensor package. The water adsorption has been calculated using the Boltzmann distribution equation at various relative humidities for borosilicate glass and polytetrafluoroethylene surfaces. At various humidities, water film thickness has been calculated, and the induced charge leakage and field attenuation have been theoretically investigated. Experiments have been performed with microsensors to verify the theoretical predictions and the results are in good agreement.
Keywords: electric field sensor; charge leakage; electric field attenuation; water film thickness; MEMS
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MDPI and ACS Style
Zhang, H.; Fang, D.; Yang, P.; Peng, C.; Wen, X.; Xia, S. Humidity-Induced Charge Leakage and Field Attenuation in Electric Field Microsensors. Sensors 2012, 12, 5105-5115.
AMA StyleZhang H, Fang D, Yang P, Peng C, Wen X, Xia S. Humidity-Induced Charge Leakage and Field Attenuation in Electric Field Microsensors. Sensors. 2012; 12(4):5105-5115.
Chicago/Turabian StyleZhang, Haiyan; Fang, Dongming; Yang, Pengfei; Peng, Chunrong; Wen, Xiaolong; Xia, Shanhong. 2012. "Humidity-Induced Charge Leakage and Field Attenuation in Electric Field Microsensors." Sensors 12, no. 4: 5105-5115.