Next Article in Journal
Method for Optimal Sensor Deployment on 3D Terrains Utilizing a Steady State Genetic Algorithm with a Guided Walk Mutation Operator Based on the Wavelet Transform
Next Article in Special Issue
Structure and Process of Infrared Hot Electron Transistor Arrays
Previous Article in Journal
Performance Analyses and Improvements for the IEEE 802.15.4 CSMA/CA Scheme with Heterogeneous Buffered Conditions
Previous Article in Special Issue
Direct Measurement of Lateral Force Using Dual Cantilevers
Article Menu

Export Article

Open AccessArticle
Sensors 2012, 12(4), 5105-5115; doi:10.3390/s120405105

Humidity-Induced Charge Leakage and Field Attenuation in Electric Field Microsensors

1
State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China
2
Graduate School of the Chinese Academy of Sciences, Beijing 100049, China
*
Author to whom correspondence should be addressed.
Received: 15 March 2012 / Revised: 6 April 2012 / Accepted: 9 April 2012 / Published: 19 April 2012
(This article belongs to the Special Issue Ultra-Small Sensor Systems and Components)
View Full-Text   |   Download PDF [501 KB, uploaded 21 June 2014]   |  

Abstract

The steady-state zero output of static electric field measuring systems often fluctuates, which is caused mainly by the finite leakage resistance of the water film on the surface of the electric field microsensor package. The water adsorption has been calculated using the Boltzmann distribution equation at various relative humidities for borosilicate glass and polytetrafluoroethylene surfaces. At various humidities, water film thickness has been calculated, and the induced charge leakage and field attenuation have been theoretically investigated. Experiments have been performed with microsensors to verify the theoretical predictions and the results are in good agreement.
Keywords: electric field sensor; charge leakage; electric field attenuation; water film thickness; MEMS electric field sensor; charge leakage; electric field attenuation; water film thickness; MEMS
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

Scifeed alert for new publications

Never miss any articles matching your research from any publisher
  • Get alerts for new papers matching your research
  • Find out the new papers from selected authors
  • Updated daily for 49'000+ journals and 6000+ publishers
  • Define your Scifeed now

SciFeed Share & Cite This Article

MDPI and ACS Style

Zhang, H.; Fang, D.; Yang, P.; Peng, C.; Wen, X.; Xia, S. Humidity-Induced Charge Leakage and Field Attenuation in Electric Field Microsensors. Sensors 2012, 12, 5105-5115.

Show more citation formats Show less citations formats

Related Articles

Article Metrics

Article Access Statistics

1

Comments

[Return to top]
Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert
Back to Top