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Sensors 2012, 12(4), 5105-5115; doi:10.3390/s120405105
Article

Humidity-Induced Charge Leakage and Field Attenuation in Electric Field Microsensors

1,2
, 1
, 1,2
, 1
, 1,2
 and 1,*
1 State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China 2 Graduate School of the Chinese Academy of Sciences, Beijing 100049, China
* Author to whom correspondence should be addressed.
Received: 15 March 2012 / Revised: 6 April 2012 / Accepted: 9 April 2012 / Published: 19 April 2012
(This article belongs to the Special Issue Ultra-Small Sensor Systems and Components)
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Abstract

The steady-state zero output of static electric field measuring systems often fluctuates, which is caused mainly by the finite leakage resistance of the water film on the surface of the electric field microsensor package. The water adsorption has been calculated using the Boltzmann distribution equation at various relative humidities for borosilicate glass and polytetrafluoroethylene surfaces. At various humidities, water film thickness has been calculated, and the induced charge leakage and field attenuation have been theoretically investigated. Experiments have been performed with microsensors to verify the theoretical predictions and the results are in good agreement.
Keywords: electric field sensor; charge leakage; electric field attenuation; water film thickness; MEMS electric field sensor; charge leakage; electric field attenuation; water film thickness; MEMS
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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MDPI and ACS Style

Zhang, H.; Fang, D.; Yang, P.; Peng, C.; Wen, X.; Xia, S. Humidity-Induced Charge Leakage and Field Attenuation in Electric Field Microsensors. Sensors 2012, 12, 5105-5115.

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