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Sensors 2012, 12(4), 3789-3797; doi:10.3390/s120403789

Resonant Frequency Characteristics of a SAW Device Attached to Resonating Micropillars

1,* , 2
Received: 19 January 2012 / Revised: 29 February 2012 / Accepted: 1 March 2012 / Published: 23 March 2012
(This article belongs to the Section Physical Sensors)
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Recently we reported experimental and simulation results on an increase in resonance frequency of a SAW resonator caused by mass loading of micropillars made of SU-8, attached normal to the surface of the resonator. We concluded that SAW resonator and the SU-8 micropillars in unison form a system of coupled resonators. We have now extended this work and performed a finite element method simulation to study the resonance frequency characteristics of the SAW-based coupled resonator. In this paper we report the effect of the resonance frequency of the micropillars on the resonance frequency of the system of coupled resonators, and observe the coupling of micropillar resonance and the propagating SAW as described in the well known Dybwad system of coupled resonators.
Keywords: surface acoustic wave devices; resonance; microsensors surface acoustic wave devices; resonance; microsensors
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Ramakrishnan, N.; Nemade, H.B.; Palathinkal, R.P. Resonant Frequency Characteristics of a SAW Device Attached to Resonating Micropillars. Sensors 2012, 12, 3789-3797.

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