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Sensors 2012, 12(12), 17007-17022; doi:10.3390/s121217007

Improved Response of ZnO Films for Pyroelectric Devices

*  and
Department of Mechanical Design Engineering, National Formosa University, No. 64, Wunhua Rd., Huwei Township, Yunlin County 632, Taiwan
* Author to whom correspondence should be addressed.
Received: 24 September 2012 / Revised: 6 December 2012 / Accepted: 7 December 2012 / Published: 12 December 2012
(This article belongs to the Section Physical Sensors)
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Increasing the temperature variation rate is a useful method for enhancing the response of pyroelectric devices. A three-dimensional ZnO film was fabricated by the aerosol deposition (AD) rapid process using the shadow mask method, which induces lateral temperature gradients on the sidewalls of the responsive element, thereby increasing the temperature variation rate. To enhance the quality of the film and reduce the concentration of defects, the film was further treated by laser annealing, and the integration of a comb-like top electrode enhanced the voltage response and reduced the response time of the resulting ZnO pyroelectric devices.
Keywords: zinc oxide; aerosol deposition; electrode; pyroelectricity zinc oxide; aerosol deposition; electrode; pyroelectricity
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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Hsiao, C.-C.; Yu, S.-Y. Improved Response of ZnO Films for Pyroelectric Devices. Sensors 2012, 12, 17007-17022.

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