Sensors 2012, 12(12), 16390-16403; doi:10.3390/s121216390
Article

Using an SU-8 Photoresist Structure and Cytochrome C Thin Film Sensing Material for a Microbolometer

Received: 8 November 2012; in revised form: 20 November 2012 / Accepted: 21 November 2012 / Published: 27 November 2012
(This article belongs to the Section Physical Sensors)
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Abstract: There are two critical parameters for microbolometers: the temperature coefficient of resistance (TCR) of the sensing material, and the thermal conductance of the insulation structure. Cytochrome c protein, having a high TCR, is a good candidate for infrared detection. We can use SU-8 photoresist for the thermal insulation structure, given its low thermal conductance. In this study, we designed a platform structure based on a SU-8 photoresist. We fabricated an infrared sensing pixel and recorded a high TCR for this new structure. The SU-8 photoresist insulation structure was fabricated using the exposure dose method. We experimentally demonstrated high values of TCR from 22%/K to 25.7%/K, and the measured noise was 1.2 × 10–8 V2/Hz at 60 Hz. When the bias current was 2 μA, the calculated voltage responsivity was 1.16 × 105 V/W. This study presents a new kind of microbolometer based on cytochrome c protein on top of an SU-8 photoresist platform that does not require expensive vacuum deposition equipment.
Keywords: cytochrome c; temperature coefficient of resistance (TCR); SU-8; microbolometer; exposure dose method
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MDPI and ACS Style

Lai, J.-L.; Liao, C.-J.; Su, G.-D.J. Using an SU-8 Photoresist Structure and Cytochrome C Thin Film Sensing Material for a Microbolometer. Sensors 2012, 12, 16390-16403.

AMA Style

Lai J-L, Liao C-J, Su G-DJ. Using an SU-8 Photoresist Structure and Cytochrome C Thin Film Sensing Material for a Microbolometer. Sensors. 2012; 12(12):16390-16403.

Chicago/Turabian Style

Lai, Jian-Lun; Liao, Chien-Jen; Su, Guo-Dung J. 2012. "Using an SU-8 Photoresist Structure and Cytochrome C Thin Film Sensing Material for a Microbolometer." Sensors 12, no. 12: 16390-16403.

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