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Sensors 2012, 12(12), 16168-16181; doi:10.3390/s121216168
Article

A Catalytic Sensor for Measurement of Radical Density in CO2 Plasmas

1
, 1
, 2
, 2
 and 1,*
1 Jozef Stefan Institute, Jamova 39, 1000 Ljubljana, Slovenia 2 PROMES-CNRS Laboratory, 7 rue du Four Solaire, 66120 Font-Romeu Odeillo, France
* Author to whom correspondence should be addressed.
Received: 10 October 2012 / Revised: 6 November 2012 / Accepted: 7 November 2012 / Published: 22 November 2012
(This article belongs to the Section Physical Sensors)
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Abstract

A catalytic sensor for the measurement of radical density in weakly ionized CO2 plasmas, created in a low-pressure electrodeless discharge, is presented. The CO2 plasma was created in a 4 cm wide borosilicate glass tube inside a copper coil connected to a radio frequency generator operating at 27.12 MHz with a nominal power of 250 W. The dissociation fraction of the CO2 molecules was measured in the early afterglow at pressures ranging from 10 Pa to 100 Pa, and at distances of up to 35 cm along the gas stream from the glowing plasma. The radical density peaked (2 × 1020 m–3) at 80 Pa. The density quickly decreased with increasing distance from the glowing plasma despite a rather large drift velocity. The dissociation fraction showed similar behavior, except that the maximum was obtained at somewhat lower pressure. The results were explained by rather intense surface recombination of radicals.
Keywords: catalytic probe; plasma probes; atom measurement; dissociation fraction measurement; carbon dioxide plasma catalytic probe; plasma probes; atom measurement; dissociation fraction measurement; carbon dioxide plasma
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Vesel, A.; Zaplotnik, R.; Iacono, J.; Balat-Pichelin, M.; Mozetic, M. A Catalytic Sensor for Measurement of Radical Density in CO2 Plasmas. Sensors 2012, 12, 16168-16181.

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