Next Article in Journal
Next Article in Special Issue
Previous Article in Journal
Sensors 2011, 11(7), 6942-6953; doi:10.3390/s110706942
Article

Highly Mass-Sensitive Thin Film Plate Acoustic Resonators (FPAR)

1
, 2
, 3, 3
, 2
, 1
 and 1,*
Received: 8 May 2011; in revised form: 8 June 2011 / Accepted: 28 June 2011 / Published: 4 July 2011
(This article belongs to the Special Issue Emerging Acoustic Wave-Based Sensors)
View Full-Text   |   Download PDF [428 KB, uploaded 21 June 2014]
Abstract: The mass sensitivity of thin aluminum nitride (AlN) film S0 Lamb wave resonators is theoretically and experimentally studied. Theoretical predictions based on modal and finite elements method analysis are experimentally verified. Here, two-port 888 MHz synchronous FPARs are micromachined and subsequently coated with hexamethyl-disiloxane(HMDSO)-plasma-polymerized thin films of various thicknesses. Systematic data on frequency shift and insertion loss versus film thickness are presented. FPARs demonstrate high mass-loading sensitivity as well as good tolerance towards the HMDSO viscous losses. Initial measurements in gas phase environment are further presented.
Keywords: resonator; aluminum nitride; membrane; HMDSO; gravimetric; sensitivity resonator; aluminum nitride; membrane; HMDSO; gravimetric; sensitivity
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Export to BibTeX |
EndNote


MDPI and ACS Style

Arapan, L.; Alexieva, G.; Avramov, I.D.; Radeva, E.; Strashilov, V.; Katardjiev, I.; Yantchev, V. Highly Mass-Sensitive Thin Film Plate Acoustic Resonators (FPAR). Sensors 2011, 11, 6942-6953.

AMA Style

Arapan L, Alexieva G, Avramov ID, Radeva E, Strashilov V, Katardjiev I, Yantchev V. Highly Mass-Sensitive Thin Film Plate Acoustic Resonators (FPAR). Sensors. 2011; 11(7):6942-6953.

Chicago/Turabian Style

Arapan, Lilia; Alexieva, Gergana; Avramov, Ivan D.; Radeva, Ekaterina; Strashilov, Vesseline; Katardjiev, Ilia; Yantchev, Ventsislav. 2011. "Highly Mass-Sensitive Thin Film Plate Acoustic Resonators (FPAR)." Sensors 11, no. 7: 6942-6953.



Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert