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Journal: Sensors, 2011
Volume: 11
Page(s): 4972-4989
4972-4989
Article: Two-Scale Simulation of Drop-Induced Failure of Polysilicon MEMS Sensors
Mariani, S.; Ghisi, A.; Corigliano, A.; Martini, R.; Simoni, B.

http://www.mdpi.com/1424-8220/11/5/4972

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