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Sensors 2011, 11(4), 3706-3716; doi:10.3390/s110403706
Article
Fabrication of a Flexible Micro Temperature Sensor for Micro Reformer Applications
Department of Mechanical Engineering, Yuan Ze Fuel Cell Center, Yuan Ze University, Taoyuan, Taiwan
* Author to whom correspondence should be addressed.
Received: 24 February 2011; in revised form: 18 March 2011 / Accepted: 25 March 2011 / Published: 25 March 2011
(This article belongs to the Section Physical Sensors)
Download PDF Full-Text [781 KB, uploaded 25 March 2011 14:55 CET]
Abstract: Micro reformers still face obstacles in minimizing their size, decreasing the concentration of CO, conversion efficiency and the feasibility of integrated fabrication with fuel cells. By using a micro temperature sensor fabricated on a stainless steel-based micro reformer, this work attempts to measure the inner temperature and increase the conversion efficiency. Micro temperature sensors on a stainless steel substrate are fabricated using micro-electro-mechanical systems (MEMS) and then placed separately inside the micro reformer. Micro temperature sensors are characterized by their higher accuracy and sensitivity than those of a conventional thermocouple. To the best of our knowledge, micro temperature sensors have not been embedded before in micro reformers and commercial products, therefore, this work presents a novel approach to integrating micro temperature sensors in a stainless steel-based micro reformer in order to evaluate inner local temperature distributions and enhance reformer performance.
Keywords: MEMS; flexible micro temperature sensor; micro reformer
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MDPI and ACS Style
Lee, C.-Y.; Lin, C.-H.; Lo, Y.-M. Fabrication of a Flexible Micro Temperature Sensor for Micro Reformer Applications. Sensors 2011, 11, 3706-3716.
AMA StyleLee C-Y, Lin C-H, Lo Y-M. Fabrication of a Flexible Micro Temperature Sensor for Micro Reformer Applications. Sensors. 2011; 11(4):3706-3716.
Chicago/Turabian StyleLee, Chi-Yuan; Lin, Chien-Hen; Lo, Yi-Man. 2011. "Fabrication of a Flexible Micro Temperature Sensor for Micro Reformer Applications." Sensors 11, no. 4: 3706-3716.