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Sensors 2011, 11(4), 3706-3716; doi:10.3390/s110403706

Fabrication of a Flexible Micro Temperature Sensor for Micro Reformer Applications

* ,
Department of Mechanical Engineering, Yuan Ze Fuel Cell Center, Yuan Ze University, Taoyuan, Taiwan
* Author to whom correspondence should be addressed.
Received: 24 February 2011 / Revised: 18 March 2011 / Accepted: 25 March 2011 / Published: 25 March 2011
(This article belongs to the Section Physical Sensors)
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Micro reformers still face obstacles in minimizing their size, decreasing the concentration of CO, conversion efficiency and the feasibility of integrated fabrication with fuel cells. By using a micro temperature sensor fabricated on a stainless steel-based micro reformer, this work attempts to measure the inner temperature and increase the conversion efficiency. Micro temperature sensors on a stainless steel substrate are fabricated using micro-electro-mechanical systems (MEMS) and then placed separately inside the micro reformer. Micro temperature sensors are characterized by their higher accuracy and sensitivity than those of a conventional thermocouple. To the best of our knowledge, micro temperature sensors have not been embedded before in micro reformers and commercial products, therefore, this work presents a novel approach to integrating micro temperature sensors in a stainless steel-based micro reformer in order to evaluate inner local temperature distributions and enhance reformer performance.
Keywords: MEMS; flexible micro temperature sensor; micro reformer MEMS; flexible micro temperature sensor; micro reformer
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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Lee, C.-Y.; Lin, C.-H.; Lo, Y.-M. Fabrication of a Flexible Micro Temperature Sensor for Micro Reformer Applications. Sensors 2011, 11, 3706-3716.

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