Sensors 2011, 11(3), 2640-2651; doi:10.3390/s110302640
Article

Study of Temperature Characteristics of Micromachined Suspended Coplanar Waveguides for Biosensing Applications

Multidisciplinary Nanotechnology Centre, College of Engineering, Swansea University, Swansea, SA2 8PP, UK
* Author to whom correspondence should be addressed.
Received: 15 November 2010; in revised form: 11 January 2011 / Accepted: 22 February 2011 / Published: 1 March 2011
(This article belongs to the Section Physical Sensors)
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Abstract: In the recent development on biosensors, coplanar waveguide based microwave dielectric sensors have been attracting more and more attentions. In this paper, microwave performance of a suspended coplanar waveguide subject to temperature variations, particularly in a small range, is studied. The prototype is realized through a MEMS fabrication foundry. The thermal transfer analysis of the device is conducted using finite element method, and the microwave properties of the device are characterized. One of the results shows that at 20 GHz, the S11 has decreased by 7.4%, and S21 has increased by 3.5% when the voltage applied to the heaters varies from 9 V to 29 V.
Keywords: temperature characteristics; coplanar waveguide; biosensors

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MDPI and ACS Style

Li, L.; Liu, Z. Study of Temperature Characteristics of Micromachined Suspended Coplanar Waveguides for Biosensing Applications. Sensors 2011, 11, 2640-2651.

AMA Style

Li L, Liu Z. Study of Temperature Characteristics of Micromachined Suspended Coplanar Waveguides for Biosensing Applications. Sensors. 2011; 11(3):2640-2651.

Chicago/Turabian Style

Li, Lijie; Liu, Zhuming. 2011. "Study of Temperature Characteristics of Micromachined Suspended Coplanar Waveguides for Biosensing Applications." Sensors 11, no. 3: 2640-2651.

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