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Development of a New Surface Acoustic Wave Based Gyroscope on a X-112°Y LiTaO3 Substrate
State Key Laboratory of Acoustics, Institute of Acoustics, Chinese Academy of Sciences, Beijing 100190, China
* Author to whom correspondence should be addressed.
Received: 12 October 2011; in revised form: 11 November 2011 / Accepted: 11 November 2011 / Published: 21 November 2011
Abstract: A new micro gyroscope based on the surface acoustic wave (SAW) gyroscopic effect was developed. The SAW gyroscopic effect is investigated by applying the surface effective permittivity method in the regime of small ratios of the rotation velocity and the frequency of the SAW. The theoretical analysis indicates that the larger velocity shift was observed from the rotated X-112°Y LiTaO3 substrate. Then, two SAW delay lines with reverse direction and an operation frequency of 160 MHz are fabricated on a same X-112°Y LiTaO3 chip as the feedback of two SAW oscillators, which act as the sensor element. The single-phase unidirectional transducer (SPUDT) and combed transducers were used to structure the delay lines to improve the frequency stability of the oscillator. The rotation of a piezoelectric medium gives rise to a shift of the propagation velocity of SAW due to the Coriolis force, resulting in the frequency shift of the SAW device, and hence, the evaluation of the sensor performance. Meanwhile, the differential structure was performed to double the sensitivity and compensate for the temperature effects. Using a precise rate table, the performance of the fabricated SAW gyroscope was evaluated experimentally. A sensitivity of 1.332 Hz deg−1 s at angular rates of up to 1,000 deg s−1 and good linearity are observed.
Keywords: Coriolis force; gyroscopic effect; SAW gyroscope; surface effective permittivity
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MDPI and ACS Style
Wang, W.; Liu, J.; Xie, X.; Liu, M.; He, S. Development of a New Surface Acoustic Wave Based Gyroscope on a X-112°Y LiTaO3 Substrate. Sensors 2011, 11, 10894-10906.
Wang W, Liu J, Xie X, Liu M, He S. Development of a New Surface Acoustic Wave Based Gyroscope on a X-112°Y LiTaO3 Substrate. Sensors. 2011; 11(11):10894-10906.
Wang, Wen; Liu, Jiuling; Xie, Xiao; Liu, Minghua; He, Shitang. 2011. "Development of a New Surface Acoustic Wave Based Gyroscope on a X-112°Y LiTaO3 Substrate." Sensors 11, no. 11: 10894-10906.