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CMOS-Integrated Film Bulk Acoustic Resonators for Label-Free Biosensing
Siemens AG Munich, Corporate Technology, Otto-Hahn-Ring 6, 81739 Munich, Germany
Laboratory of Biosensors and Bioelectronics, Institute for Biomedical Engineering, ETH Zurich, Switzerland
VTT Technical Research Centre of Finland, Tietotie 3, Espoo, FI-02044 VTT, Finland
VTT Technical Research Centre of Finland, P.O. Box 1300, FI-33101 Tampere, Finland
Biosensor Applications AB, Solna Strandväg 3, 171 54 Solna, Sweden
* Author to whom correspondence should be addressed.
Received: 28 February 2010; in revised form: 18 March 2010 / Accepted: 4 April 2010 / Published: 27 April 2010
Abstract: The throughput is an important parameter for label-free biosensors. Acoustic resonators like the quartz crystal microbalance have a low throughput because the number of sensors which can be used at the same time is limited. Here we present an array of 64 CMOS-integrated film bulk acoustic resonators. We compare the performance with surface plasmon resonance and the quartz crystal microbalance and demonstrate the performance of the sensor for multiplexed detection of DNA.
Keywords: FBAR; film bulk acoustic resonator; CMOS; DNA; thickness shear mode; TSM; label-free; biosensor; biomolecular interaction analysis
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Nirschl, M.; Rantala, A.; Tukkiniemi, K.; Auer, S.; Hellgren, A.-C.; Pitzer, D.; Schreiter, M.; Vikholm-Lundin, I. CMOS-Integrated Film Bulk Acoustic Resonators for Label-Free Biosensing. Sensors 2010, 10, 4180-4193.
Nirschl M, Rantala A, Tukkiniemi K, Auer S, Hellgren A-C, Pitzer D, Schreiter M, Vikholm-Lundin I. CMOS-Integrated Film Bulk Acoustic Resonators for Label-Free Biosensing. Sensors. 2010; 10(5):4180-4193.
Nirschl, Martin; Rantala, Arto; Tukkiniemi, Kari; Auer, Sanna; Hellgren, Ann-Charlotte; Pitzer, Dana; Schreiter, Matthias; Vikholm-Lundin, Inger. 2010. "CMOS-Integrated Film Bulk Acoustic Resonators for Label-Free Biosensing." Sensors 10, no. 5: 4180-4193.