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Sensors 2010, 10(5), 4180-4193; doi:10.3390/s100504180
Article

CMOS-Integrated Film Bulk Acoustic Resonators for Label-Free Biosensing

1,2,* , 3
, 3
, 4
, 5
, 1
, 1
 and 4
1 Siemens AG Munich, Corporate Technology, Otto-Hahn-Ring 6, 81739 Munich, Germany 2 Laboratory of Biosensors and Bioelectronics, Institute for Biomedical Engineering, ETH Zurich, Switzerland 3 VTT Technical Research Centre of Finland, Tietotie 3, Espoo, FI-02044 VTT, Finland 4 VTT Technical Research Centre of Finland, P.O. Box 1300, FI-33101 Tampere, Finland 5 Biosensor Applications AB, Solna Strandväg 3, 171 54 Solna, Sweden
* Author to whom correspondence should be addressed.
Received: 28 February 2010 / Revised: 18 March 2010 / Accepted: 4 April 2010 / Published: 27 April 2010
(This article belongs to the Section Biosensors)
Download PDF [416 KB, 21 June 2014; original version 21 June 2014]

Abstract

The throughput is an important parameter for label-free biosensors. Acoustic resonators like the quartz crystal microbalance have a low throughput because the number of sensors which can be used at the same time is limited. Here we present an array of 64 CMOS-integrated film bulk acoustic resonators. We compare the performance with surface plasmon resonance and the quartz crystal microbalance and demonstrate the performance of the sensor for multiplexed detection of DNA.
Keywords: FBAR; film bulk acoustic resonator; CMOS; DNA; thickness shear mode; TSM; label-free; biosensor; biomolecular interaction analysis FBAR; film bulk acoustic resonator; CMOS; DNA; thickness shear mode; TSM; label-free; biosensor; biomolecular interaction analysis
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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MDPI and ACS Style

Nirschl, M.; Rantala, A.; Tukkiniemi, K.; Auer, S.; Hellgren, A.-C.; Pitzer, D.; Schreiter, M.; Vikholm-Lundin, I. CMOS-Integrated Film Bulk Acoustic Resonators for Label-Free Biosensing. Sensors 2010, 10, 4180-4193.

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