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Sensors 2010, 10(5), 4180-4193; doi:10.3390/s100504180
Article

CMOS-Integrated Film Bulk Acoustic Resonators for Label-Free Biosensing

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Received: 28 February 2010 / Revised: 18 March 2010 / Accepted: 4 April 2010 / Published: 27 April 2010
(This article belongs to the Section Biosensors)
Download PDF [416 KB, 21 June 2014; original version 21 June 2014]

Abstract

The throughput is an important parameter for label-free biosensors. Acoustic resonators like the quartz crystal microbalance have a low throughput because the number of sensors which can be used at the same time is limited. Here we present an array of 64 CMOS-integrated film bulk acoustic resonators. We compare the performance with surface plasmon resonance and the quartz crystal microbalance and demonstrate the performance of the sensor for multiplexed detection of DNA.
Keywords: FBAR; film bulk acoustic resonator; CMOS; DNA; thickness shear mode; TSM; label-free; biosensor; biomolecular interaction analysis FBAR; film bulk acoustic resonator; CMOS; DNA; thickness shear mode; TSM; label-free; biosensor; biomolecular interaction analysis
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Nirschl, M.; Rantala, A.; Tukkiniemi, K.; Auer, S.; Hellgren, A.-C.; Pitzer, D.; Schreiter, M.; Vikholm-Lundin, I. CMOS-Integrated Film Bulk Acoustic Resonators for Label-Free Biosensing. Sensors 2010, 10, 4180-4193.

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