Sensors 2010, 10(5), 4180-4193; doi:10.3390/s100504180
Article

CMOS-Integrated Film Bulk Acoustic Resonators for Label-Free Biosensing

1,2,* email, 3email, 3email, 4email, 5email, 1email, 1email and 4email
Received: 28 February 2010; in revised form: 18 March 2010 / Accepted: 4 April 2010 / Published: 27 April 2010
(This article belongs to the Section Biosensors)
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
Abstract: The throughput is an important parameter for label-free biosensors. Acoustic resonators like the quartz crystal microbalance have a low throughput because the number of sensors which can be used at the same time is limited. Here we present an array of 64 CMOS-integrated film bulk acoustic resonators. We compare the performance with surface plasmon resonance and the quartz crystal microbalance and demonstrate the performance of the sensor for multiplexed detection of DNA.
Keywords: FBAR; film bulk acoustic resonator; CMOS; DNA; thickness shear mode; TSM; label-free; biosensor; biomolecular interaction analysis
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MDPI and ACS Style

Nirschl, M.; Rantala, A.; Tukkiniemi, K.; Auer, S.; Hellgren, A.-C.; Pitzer, D.; Schreiter, M.; Vikholm-Lundin, I. CMOS-Integrated Film Bulk Acoustic Resonators for Label-Free Biosensing. Sensors 2010, 10, 4180-4193.

AMA Style

Nirschl M, Rantala A, Tukkiniemi K, Auer S, Hellgren A-C, Pitzer D, Schreiter M, Vikholm-Lundin I. CMOS-Integrated Film Bulk Acoustic Resonators for Label-Free Biosensing. Sensors. 2010; 10(5):4180-4193.

Chicago/Turabian Style

Nirschl, Martin; Rantala, Arto; Tukkiniemi, Kari; Auer, Sanna; Hellgren, Ann-Charlotte; Pitzer, Dana; Schreiter, Matthias; Vikholm-Lundin, Inger. 2010. "CMOS-Integrated Film Bulk Acoustic Resonators for Label-Free Biosensing." Sensors 10, no. 5: 4180-4193.


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