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Sensors 2010, 10(3), 1753-1764; doi:10.3390/s100301753
Article

Cobalt Oxide Nanosheet and CNT Micro Carbon Monoxide Sensor Integrated with Readout Circuit on Chip

1,* , 1
, 2
 and 3
Received: 31 December 2009; in revised form: 30 January 2010 / Accepted: 4 February 2010 / Published: 3 March 2010
(This article belongs to the Special Issue Metal-Oxide Based Nanosensors)
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Abstract: The study presents a micro carbon monoxide (CO) sensor integrated with a readout circuit-on-a-chip manufactured by the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process and a post-process. The sensing film of the sensor is a composite cobalt oxide nanosheet and carbon nanotube (CoOOH/CNT) film that is prepared by a precipitation-oxidation method. The structure of the CO sensor is composed of a polysilicon resistor and a sensing film. The sensor, which is of a resistive type, changes its resistance when the sensing film adsorbs or desorbs CO gas. The readout circuit is used to convert the sensor resistance into the voltage output. The post-processing of the sensor includes etching the sacrificial layers and coating the sensing film. The advantages of the sensor include room temperature operation, short response/recovery times and easy post-processing. Experimental results show that the sensitivity of the CO sensor is about 0.19 mV/ppm, and the response and recovery times are 23 s and 34 s for 200 ppm CO, respectively.
Keywords: micro carbon monoxide sensor; cobalt oxide film; readout circuit micro carbon monoxide sensor; cobalt oxide film; readout circuit
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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MDPI and ACS Style

Dai, C.-L.; Chen, Y.-C.; Wu, C.-C.; Kuo, C.-F. Cobalt Oxide Nanosheet and CNT Micro Carbon Monoxide Sensor Integrated with Readout Circuit on Chip. Sensors 2010, 10, 1753-1764.

AMA Style

Dai C-L, Chen Y-C, Wu C-C, Kuo C-F. Cobalt Oxide Nanosheet and CNT Micro Carbon Monoxide Sensor Integrated with Readout Circuit on Chip. Sensors. 2010; 10(3):1753-1764.

Chicago/Turabian Style

Dai, Ching-Liang; Chen, Yen-Chi; Wu, Chyan-Chyi; Kuo, Chin-Fu. 2010. "Cobalt Oxide Nanosheet and CNT Micro Carbon Monoxide Sensor Integrated with Readout Circuit on Chip." Sensors 10, no. 3: 1753-1764.



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