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Sensors 2010, 10(3), 1753-1764; doi:10.3390/s100301753

Cobalt Oxide Nanosheet and CNT Micro Carbon Monoxide Sensor Integrated with Readout Circuit on Chip

1
Department of Mechanical Engineering, National Chung Hsing University, Taichung, 402 Taiwan
2
Department of Mechanical and Electro-Mechanical Engineering, Tamkang University, Tamsui, 251 Taiwan
3
Microsystems Technology Center, Industrial Technology Research Institute, Tainan, 709 Taiwan
*
Author to whom correspondence should be addressed.
Received: 31 December 2009 / Revised: 30 January 2010 / Accepted: 4 February 2010 / Published: 3 March 2010
(This article belongs to the Special Issue Metal-Oxide Based Nanosensors)
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Abstract

The study presents a micro carbon monoxide (CO) sensor integrated with a readout circuit-on-a-chip manufactured by the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process and a post-process. The sensing film of the sensor is a composite cobalt oxide nanosheet and carbon nanotube (CoOOH/CNT) film that is prepared by a precipitation-oxidation method. The structure of the CO sensor is composed of a polysilicon resistor and a sensing film. The sensor, which is of a resistive type, changes its resistance when the sensing film adsorbs or desorbs CO gas. The readout circuit is used to convert the sensor resistance into the voltage output. The post-processing of the sensor includes etching the sacrificial layers and coating the sensing film. The advantages of the sensor include room temperature operation, short response/recovery times and easy post-processing. Experimental results show that the sensitivity of the CO sensor is about 0.19 mV/ppm, and the response and recovery times are 23 s and 34 s for 200 ppm CO, respectively.
Keywords: micro carbon monoxide sensor; cobalt oxide film; readout circuit micro carbon monoxide sensor; cobalt oxide film; readout circuit
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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MDPI and ACS Style

Dai, C.-L.; Chen, Y.-C.; Wu, C.-C.; Kuo, C.-F. Cobalt Oxide Nanosheet and CNT Micro Carbon Monoxide Sensor Integrated with Readout Circuit on Chip. Sensors 2010, 10, 1753-1764.

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