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Sensors 2010, 10(12), 11156-11173; doi:10.3390/s101211156

Integrated LTCC Pressure/Flow/Temperature Multisensor for Compressed Air Diagnostics

* ,
Laboratoire de Production Microtechnique (LPM), École Polytechnique Fédérale de Lausanne (EPFL), Station 17, CH-1015 Lausanne, Switzerland
* Author to whom correspondence should be addressed.
Received: 26 October 2010 / Revised: 22 November 2010 / Accepted: 22 November 2010 / Published: 8 December 2010
(This article belongs to the Special Issue Advanced Embedded Sensors)


We present a multisensor designed for industrial compressed air diagnostics and combining the measurement of pressure, flow, and temperature, integrated with the corresponding signal conditioning electronics in a single low-temperature co-fired ceramic (LTCC) package. The developed sensor may be soldered onto an integrated electro-fluidic platform by using standard surface mount device (SMD) technology, e.g., as a standard electronic component would be on a printed circuit board, obviating the need for both wires and tubes and thus paving the road towards low-cost integrated electro-fluidic systems. Several performance aspects of this device are presented and discussed, together with electronics design issues.
Keywords: LTCC; integrated multisensor; pressure; flow; temperature; SMD mounting LTCC; integrated multisensor; pressure; flow; temperature; SMD mounting
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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Fournier, Y.; Maeder, T.; Boutinard-Rouelle, G.; Barras, A.; Craquelin, N.; Ryser, P. Integrated LTCC Pressure/Flow/Temperature Multisensor for Compressed Air Diagnostics. Sensors 2010, 10, 11156-11173.

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