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Sensors 2010, 10(12), 11156-11173; doi:10.3390/s101211156
Article

Integrated LTCC Pressure/Flow/Temperature Multisensor for Compressed Air Diagnostics

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Received: 26 October 2010; in revised form: 22 November 2010 / Accepted: 22 November 2010 / Published: 8 December 2010
(This article belongs to the Special Issue Advanced Embedded Sensors)
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Abstract: We present a multisensor designed for industrial compressed air diagnostics and combining the measurement of pressure, flow, and temperature, integrated with the corresponding signal conditioning electronics in a single low-temperature co-fired ceramic (LTCC) package. The developed sensor may be soldered onto an integrated electro-fluidic platform by using standard surface mount device (SMD) technology, e.g., as a standard electronic component would be on a printed circuit board, obviating the need for both wires and tubes and thus paving the road towards low-cost integrated electro-fluidic systems. Several performance aspects of this device are presented and discussed, together with electronics design issues.
Keywords: LTCC; integrated multisensor; pressure; flow; temperature; SMD mounting LTCC; integrated multisensor; pressure; flow; temperature; SMD mounting
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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MDPI and ACS Style

Fournier, Y.; Maeder, T.; Boutinard-Rouelle, G.; Barras, A.; Craquelin, N.; Ryser, P. Integrated LTCC Pressure/Flow/Temperature Multisensor for Compressed Air Diagnostics. Sensors 2010, 10, 11156-11173.

AMA Style

Fournier Y, Maeder T, Boutinard-Rouelle G, Barras A, Craquelin N, Ryser P. Integrated LTCC Pressure/Flow/Temperature Multisensor for Compressed Air Diagnostics. Sensors. 2010; 10(12):11156-11173.

Chicago/Turabian Style

Fournier, Yannick; Maeder, Thomas; Boutinard-Rouelle, Grégoire; Barras, Aurélie; Craquelin, Nicolas; Ryser, Peter. 2010. "Integrated LTCC Pressure/Flow/Temperature Multisensor for Compressed Air Diagnostics." Sensors 10, no. 12: 11156-11173.



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