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Integrated LTCC Pressure/Flow/Temperature Multisensor for Compressed Air Diagnostics†
Laboratoire de Production Microtechnique (LPM), École Polytechnique Fédérale de Lausanne (EPFL), Station 17, CH-1015 Lausanne, Switzerland
* Author to whom correspondence should be addressed.
Received: 26 October 2010; in revised form: 22 November 2010 / Accepted: 22 November 2010 / Published: 8 December 2010
Abstract: We present a multisensor designed for industrial compressed air diagnostics and combining the measurement of pressure, flow, and temperature, integrated with the corresponding signal conditioning electronics in a single low-temperature co-fired ceramic (LTCC) package. The developed sensor may be soldered onto an integrated electro-fluidic platform by using standard surface mount device (SMD) technology, e.g., as a standard electronic component would be on a printed circuit board, obviating the need for both wires and tubes and thus paving the road towards low-cost integrated electro-fluidic systems. Several performance aspects of this device are presented and discussed, together with electronics design issues.
Keywords: LTCC; integrated multisensor; pressure; flow; temperature; SMD mounting
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MDPI and ACS Style
Fournier, Y.; Maeder, T.; Boutinard-Rouelle, G.; Barras, A.; Craquelin, N.; Ryser, P. Integrated LTCC Pressure/Flow/Temperature Multisensor for Compressed Air Diagnostics†. Sensors 2010, 10, 11156-11173.
Fournier Y, Maeder T, Boutinard-Rouelle G, Barras A, Craquelin N, Ryser P. Integrated LTCC Pressure/Flow/Temperature Multisensor for Compressed Air Diagnostics†. Sensors. 2010; 10(12):11156-11173.
Fournier, Yannick; Maeder, Thomas; Boutinard-Rouelle, Grégoire; Barras, Aurélie; Craquelin, Nicolas; Ryser, Peter. 2010. "Integrated LTCC Pressure/Flow/Temperature Multisensor for Compressed Air Diagnostics†." Sensors 10, no. 12: 11156-11173.