Sensors 2010, 10(12), 10673-10682; doi:10.3390/s101210673

A Compact Vertical Scanner for Atomic Force Microscopes

1 NEMS and Bio Team, National Nano-fab Center, 335, Gwahangno, Yuseong-gu, Daejeon-si, 305-806, Korea 2 School of Mechanical Engineering, Yeungnam University, 214-1, Dae-dong, Gyeongsan-si, Gyeongsangbukdo, 712-749, Korea
* Author to whom correspondence should be addressed.
Received: 16 September 2010; in revised form: 14 October 2010 / Accepted: 26 November 2010 / Published: 30 November 2010
(This article belongs to the Section Physical Sensors)
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Abstract: A compact vertical scanner for an atomic force microscope (AFM) is developed. The vertical scanner is designed to have no interference with the optical microscope for viewing the cantilever. The theoretical stiffness and resonance of the scanner are derived and verified via finite element analysis. An optimal design process that maximizes the resonance frequency is performed. To evaluate the scanner’s performance, experiments are performed to evaluate the travel range, resonance frequency, and feedback noise level. In addition, an AFM image using the proposed vertical scanner is generated.
Keywords: nano-scanner; atomic force microscope; flexure-guide; piezoelectric actuator; nano-sensor

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MDPI and ACS Style

Park, J.H.; Shim, J.; Lee, D.-Y. A Compact Vertical Scanner for Atomic Force Microscopes. Sensors 2010, 10, 10673-10682.

AMA Style

Park JH, Shim J, Lee D-Y. A Compact Vertical Scanner for Atomic Force Microscopes. Sensors. 2010; 10(12):10673-10682.

Chicago/Turabian Style

Park, Jae Hong; Shim, Jaesool; Lee, Dong-Yeon. 2010. "A Compact Vertical Scanner for Atomic Force Microscopes." Sensors 10, no. 12: 10673-10682.

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