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Sensors 2010, 10(12), 10673-10682; doi:10.3390/s101210673
Article

A Compact Vertical Scanner for Atomic Force Microscopes

1
, 2
 and 2,*
Received: 16 September 2010; in revised form: 14 October 2010 / Accepted: 26 November 2010 / Published: 30 November 2010
(This article belongs to the Section Physical Sensors)
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Abstract: A compact vertical scanner for an atomic force microscope (AFM) is developed. The vertical scanner is designed to have no interference with the optical microscope for viewing the cantilever. The theoretical stiffness and resonance of the scanner are derived and verified via finite element analysis. An optimal design process that maximizes the resonance frequency is performed. To evaluate the scanner’s performance, experiments are performed to evaluate the travel range, resonance frequency, and feedback noise level. In addition, an AFM image using the proposed vertical scanner is generated.
Keywords: nano-scanner; atomic force microscope; flexure-guide; piezoelectric actuator; nano-sensor nano-scanner; atomic force microscope; flexure-guide; piezoelectric actuator; nano-sensor
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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MDPI and ACS Style

Park, J.H.; Shim, J.; Lee, D.-Y. A Compact Vertical Scanner for Atomic Force Microscopes. Sensors 2010, 10, 10673-10682.

AMA Style

Park JH, Shim J, Lee D-Y. A Compact Vertical Scanner for Atomic Force Microscopes. Sensors. 2010; 10(12):10673-10682.

Chicago/Turabian Style

Park, Jae Hong; Shim, Jaesool; Lee, Dong-Yeon. 2010. "A Compact Vertical Scanner for Atomic Force Microscopes." Sensors 10, no. 12: 10673-10682.



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