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Sensors 2010, 10(12), 10673-10682; doi:10.3390/s101210673

A Compact Vertical Scanner for Atomic Force Microscopes

1 NEMS and Bio Team, National Nano-fab Center, 335, Gwahangno, Yuseong-gu, Daejeon-si, 305-806, Korea 2 School of Mechanical Engineering, Yeungnam University, 214-1, Dae-dong, Gyeongsan-si, Gyeongsangbukdo, 712-749, Korea
* Author to whom correspondence should be addressed.
Received: 16 September 2010 / Revised: 14 October 2010 / Accepted: 26 November 2010 / Published: 30 November 2010
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A compact vertical scanner for an atomic force microscope (AFM) is developed. The vertical scanner is designed to have no interference with the optical microscope for viewing the cantilever. The theoretical stiffness and resonance of the scanner are derived and verified via finite element analysis. An optimal design process that maximizes the resonance frequency is performed. To evaluate the scanner’s performance, experiments are performed to evaluate the travel range, resonance frequency, and feedback noise level. In addition, an AFM image using the proposed vertical scanner is generated.
Keywords: nano-scanner; atomic force microscope; flexure-guide; piezoelectric actuator; nano-sensor nano-scanner; atomic force microscope; flexure-guide; piezoelectric actuator; nano-sensor
This is an open access article distributed under the Creative Commons Attribution License (CC BY) which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Park, J.H.; Shim, J.; Lee, D.-Y. A Compact Vertical Scanner for Atomic Force Microscopes. Sensors 2010, 10, 10673-10682.

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