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A Compact Vertical Scanner for Atomic Force Microscopes
NEMS and Bio Team, National Nano-fab Center, 335, Gwahangno, Yuseong-gu, Daejeon-si, 305-806, Korea
School of Mechanical Engineering, Yeungnam University, 214-1, Dae-dong, Gyeongsan-si, Gyeongsangbukdo, 712-749, Korea
* Author to whom correspondence should be addressed.
Received: 16 September 2010; in revised form: 14 October 2010 / Accepted: 26 November 2010 / Published: 30 November 2010
Abstract: A compact vertical scanner for an atomic force microscope (AFM) is developed. The vertical scanner is designed to have no interference with the optical microscope for viewing the cantilever. The theoretical stiffness and resonance of the scanner are derived and verified via finite element analysis. An optimal design process that maximizes the resonance frequency is performed. To evaluate the scanner’s performance, experiments are performed to evaluate the travel range, resonance frequency, and feedback noise level. In addition, an AFM image using the proposed vertical scanner is generated.
Keywords: nano-scanner; atomic force microscope; flexure-guide; piezoelectric actuator; nano-sensor
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MDPI and ACS Style
Park, J.H.; Shim, J.; Lee, D.-Y. A Compact Vertical Scanner for Atomic Force Microscopes. Sensors 2010, 10, 10673-10682.
Park JH, Shim J, Lee D-Y. A Compact Vertical Scanner for Atomic Force Microscopes. Sensors. 2010; 10(12):10673-10682.
Park, Jae Hong; Shim, Jaesool; Lee, Dong-Yeon. 2010. "A Compact Vertical Scanner for Atomic Force Microscopes." Sensors 10, no. 12: 10673-10682.