Sensors 2010, 10(12), 10673-10682; doi:10.3390/s101210673
Article

A Compact Vertical Scanner for Atomic Force Microscopes

1 NEMS and Bio Team, National Nano-fab Center, 335, Gwahangno, Yuseong-gu, Daejeon-si, 305-806, Korea 2 School of Mechanical Engineering, Yeungnam University, 214-1, Dae-dong, Gyeongsan-si, Gyeongsangbukdo, 712-749, Korea
* Author to whom correspondence should be addressed.
Received: 16 September 2010; in revised form: 14 October 2010 / Accepted: 26 November 2010 / Published: 30 November 2010
(This article belongs to the Section Physical Sensors)
PDF Full-text Download PDF Full-Text [454 KB, uploaded 30 November 2010 16:14 CET]
Abstract: A compact vertical scanner for an atomic force microscope (AFM) is developed. The vertical scanner is designed to have no interference with the optical microscope for viewing the cantilever. The theoretical stiffness and resonance of the scanner are derived and verified via finite element analysis. An optimal design process that maximizes the resonance frequency is performed. To evaluate the scanner’s performance, experiments are performed to evaluate the travel range, resonance frequency, and feedback noise level. In addition, an AFM image using the proposed vertical scanner is generated.
Keywords: nano-scanner; atomic force microscope; flexure-guide; piezoelectric actuator; nano-sensor

Article Statistics

Load and display the download statistics.

Citations to this Article

Cite This Article

MDPI and ACS Style

Park, J.H.; Shim, J.; Lee, D.-Y. A Compact Vertical Scanner for Atomic Force Microscopes. Sensors 2010, 10, 10673-10682.

AMA Style

Park JH, Shim J, Lee D-Y. A Compact Vertical Scanner for Atomic Force Microscopes. Sensors. 2010; 10(12):10673-10682.

Chicago/Turabian Style

Park, Jae Hong; Shim, Jaesool; Lee, Dong-Yeon. 2010. "A Compact Vertical Scanner for Atomic Force Microscopes." Sensors 10, no. 12: 10673-10682.

Sensors EISSN 1424-8220 Published by MDPI AG, Basel, Switzerland RSS E-Mail Table of Contents Alert