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• Shim, J
• Lee, D
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• Shim, J
• Lee, D

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Sensors 2010, 10(12), 10673-10682; doi:10.3390/s101210673

Article

A Compact Vertical Scanner for Atomic Force Microscopes

Jae Hong Park ¹ , Jaesool Shim ²  and Dong-Yeon Lee ^2,*

¹ NEMS and Bio Team, National Nano-fab Center, 335, Gwahangno, Yuseong-gu, Daejeon-si, 305-806, Korea ² School of Mechanical Engineering, Yeungnam University, 214-1, Dae-dong, Gyeongsan-si, Gyeongsangbukdo, 712-749, Korea

* Author to whom correspondence should be addressed.

Received: 16 September 2010; in revised form: 14 October 2010 / Accepted: 26 November 2010 / Published: 30 November 2010

(This article belongs to the Section Physical Sensors)

Download PDF Full-Text [454 KB, uploaded 30 November 2010 16:14 CET]

Abstract: A compact vertical scanner for an atomic force microscope (AFM) is developed. The vertical scanner is designed to have no interference with the optical microscope for viewing the cantilever. The theoretical stiffness and resonance of the scanner are derived and verified via finite element analysis. An optimal design process that maximizes the resonance frequency is performed. To evaluate the scanner’s performance, experiments are performed to evaluate the travel range, resonance frequency, and feedback noise level. In addition, an AFM image using the proposed vertical scanner is generated.

Keywords: nano-scanner; atomic force microscope; flexure-guide; piezoelectric actuator; nano-sensor

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