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Sensors 2010, 10(11), 10211-10225; doi:10.3390/s101110211

A Polymer-Based Capacitive Sensing Array for Normal and Shear Force Measurement

Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan
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Received: 18 October 2010 / Revised: 5 November 2010 / Accepted: 8 November 2010 / Published: 15 November 2010
(This article belongs to the Special Issue 10 Years Sensors - A Decade of Publishing)
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Abstract

In this work, we present the development of a polymer-based capacitive sensing array. The proposed device is capable of measuring normal and shear forces, and can be easily realized by using micromachining techniques and flexible printed circuit board (FPCB) technologies. The sensing array consists of a polydimethlysiloxane (PDMS) structure and a FPCB. Each shear sensing element comprises four capacitive sensing cells arranged in a 2 × 2 array, and each capacitive sensing cell has two sensing electrodes and a common floating electrode. The sensing electrodes as well as the metal interconnect for signal scanning are implemented on the FPCB, while the floating electrodes are patterned on the PDMS structure. This design can effectively reduce the complexity of the capacitive structures, and thus makes the device highly manufacturable. The characteristics of the devices with different dimensions were measured and discussed. A scanning circuit was also designed and implemented. The measured maximum sensitivity is 1.67%/mN. The minimum resolvable force is 26 mN measured by the scanning circuit. The capacitance distributions induced by normal and shear forces were also successfully captured by the sensing array. View Full-Text
Keywords: tactile sensing array; shear sensing array; capacitive sensing; micromachining; flexible electronics tactile sensing array; shear sensing array; capacitive sensing; micromachining; flexible electronics
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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MDPI and ACS Style

Cheng, M.-Y.; Lin, C.-L.; Lai, Y.-T.; Yang, Y.-J. A Polymer-Based Capacitive Sensing Array for Normal and Shear Force Measurement. Sensors 2010, 10, 10211-10225.

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