Emerging Micro Manufacturing Technologies and Applications

Edited by
July 2023
162 pages
  • ISBN978-3-0365-8213-9 (Hardback)
  • ISBN978-3-0365-8212-2 (PDF)

This book is a reprint of the Special Issue Emerging Micro Manufacturing Technologies and Applications that was published in

Chemistry & Materials Science
Physical Sciences
This is a reprint of the Special Issue ’Emerging Micro Manufacturing Technologies and Applications’ published in the journal Micromachines (MDPI). It contains eleven articles, including one Editorial, nine research papers, and one review.
  • Hardback
License and Copyright
© 2022 by the authors; CC BY-NC-ND license
multi-beam micromachning; functionalization; tempered glass; gloss reduction; anti-reflection; SOI substrate; cavity-SOI; cavity-BOX; patterned BOX; buried hard-etch mask; flex to rigid (F2R); MEMS; miniaturization; DBS; foldable devices; laser polishing; different surface morphologies; melt hydrodynamics; numerical simulation; alloy wire; processing rate; annealing; strength; elongation; resistivity; tension; silicon nanowires; nanoparticles; Bosch process; anti-reflection; hydrophobicity; very high frequency (VHF); multi-split electrode; low-temperature polysilicon (LTPS); precision processing; electroforming; MEMS; metal structures; deformation; electrical discharge coating; microhardness; material deposition rate; TOPSIS; Fused Deposition Modeling (FDM); acrylonitrile butadiene styrene (ABS); polyamide (Nylon); fatigue; ANCOVA regression analysis; Taguchi analysis; parametric study; numerical study; bonding wire; manufacturability; reliability; general comparison; development trends; n/a