Keywordstouch-trigger probe; stiffness; quadrant photo detector; coordinate measuring machine; micro coordinate measuring machine; Abbe error free; three dimensional measurement; on-machine; turning; dimension error; auto-inspection; tool wear; auto-compensation; Coordinate Measuring Machines (CMM); five-axis system; accuracy modeling; Monte Carlo method; probe head; virtual model; surface force; van der Waals force; electrostatic force; liquid bridge force; microstructure; measurement; optical fiber probe; laser diode; coordinate measuring machine (CMM); micro coordinate metrology; tactile probe; calibration; performance verification; measurement; micro-probe; on-line qualification; gauge block; uncertainty; metrology; slot die coater; coordinate metrology; Monte Carlo method; uncertainty; copulas theory; metrological traceability; portable articulated coordinate measuring machine; generalized geometric error parameters; sample strategy; Levenberg-Marquard algorithm; micro-EDM; micro spherical stylus tip; micro-CMM; micro-coordinate measuring machine (micro-CMM); 3D coordinate metrology; microparts; traceability; calibration; CMM probe; physical standards; microhole; microgear; contour
