Dr. Ulrich Schmid

Institute of Sensor and Actuator Systems Austria

Related books

ISBN 978-3-03897-005-7 (Pbk); ISBN 978-3-03897-006-4 (PDF)
© 2018 by the authors; CC BY-NC-ND license

Piezoelectric MEMS

Pages: VIII, 168
Published: June 2016
(This book is a printed edition of the Special Issue Piezoelectric MEMS that was published in Micromachines)
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