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Transducer Systems

Special Issue Information

Keywords

  • sensor MEMS and complete devices thereof
  • actuator MEMS and complete devices thereof
  • systems architecture, back-end technology
  • packaging
  • microfluidics
  • MEMS for industrial applications
  • MEMS in metrology
  • MEMS in process control
  • MEMS in surveillance
  • MEMS systems integration
  • very large scale integrated micromechanical systems

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Published Papers

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Sensors - ISSN 1424-8220