Search Results (2)

Feedthrough interference is inevitably introduced in MEMS gyroscopes due to non-ideal factors such as circuit layout design and fabrication processes, exerting non-negligible impacts on gyroscope performance. This study proposes a feedthrough suppression scheme for MEMS gyroscopes based on mixed-frequency excitation signals. Leveraging the quadratic relationship between excitation voltage and electrostatic force in capacitive resonators, the resonator is excited with a modulated signal at a non-resonant frequency while sensing vibration signals at the resonant frequency. This approach achieves linear excitation without requiring backend demodulation circuits, effectively separating desired signals from feedthrough interference in the frequency domain. A mixed-frequency excitation-based measurement and control system for MEMS gyroscopes is constructed. The influence of mismatch phenomena under non-ideal conditions on the control system is analyzed with corresponding solutions provided. Simulations and experiments validate the scheme’s effectiveness, demonstrating feedthrough suppression through both amplitude-frequency characteristics and scale factor perspectives. Test results confirm the scheme eliminates the zero introduced by feedthrough interference in the gyroscope’s amplitude-frequency response curve and reduces force-to-rebalanced detection scale factor fluctuations caused by frequency split variations by a factor of 21. Under this scheme, the gyroscope achieves zero-bias stability of 0.3118 °/h and angle random walk of 0.2443 °/h/√Hz. Full article

A subnano-g electrostatic force-rebalanced flexure accelerometer is designed for the rotating accelerometer gravity gradient instrument. This accelerometer has a large proof mass, which is supported inversely by two pairs of parallel leaf springs and is centered between two fixed capacitor plates. This novel design enables the proof mass to move exactly along the sensitive direction and exhibits a high rejection ratio at its cross-axis directions. Benefiting from large proof mass, high vacuum packaging, and air-tight sealing, the thermal Brownian noise of the accelerometer is lowered down to less than 0.2 $\mathrm{ng}/\sqrt{\mathrm{Hz}}$ with a quality factor of 15 and a natural resonant frequency of about $7.4\mathrm{Hz}$ . The accelerometer’s designed measurement range is about ±1 mg. Based on the correlation analysis between a commercial triaxial seismometer and our accelerometer, the demonstrated self-noise of our accelerometers is reduced to lower than 0.3 $\mathrm{ng}/\sqrt{\mathrm{Hz}}$ over the frequency ranging from 0.2 to 2 Hz, which meets the requirement of the rotating accelerometer gravity gradiometer. Full article