Search Results (13)

A phasemeter as a readout system for the inter-satellite laser interferometer in a space-borne gravitational wave detector requires not only high accuracy but also insensitivity to amplitude fluctuations and a large fast-acquiring range. The traditional sinusoidal characteristic phase detector (SPD) phasemeter has the advantages of a simple structure and easy realization. However, the output of an SPD is coupled to the amplitude of the input signal and has only a limited phase-detection range due to the boundedness of the sinusoidal function. This leads to the performance deterioration of amplitude noise suppression, fast-acquiring range, and loop stability. To overcome the above shortcomings, we propose a phasemeter based on a tangent phase detector (TPD). The characteristics of the SPD and TPD phasemeters are theoretically analyzed, and a fixed-point simulation is further carried out for verification. The simulation results show that the TPD phasemeter tracks the phase information well and, at the same time, suppresses the amplitude fluctuation to the noise floor of 1 μrad/Hz^1/2, which meets the requirements of GW detection. In addition, the maximum lockable step frequency of the TPD phasemeter is almost three times larger than the SPD phasemeter, indicating a greater fast-acquiring range. Full article

The presence of strong ambient vibrations could have a negative impact on applications such as high precision inertial navigation and tilt measurement due to the vibration rectification error (VRE) of the accelerometer. In this paper, we investigate the origins of the VRE using a self-developed MEMS accelerometer equipped with an area-variation-based capacitive displacement transducer. Our findings indicate that the second-order nonlinearity coefficient is dependent on the frequency but the VRE remains constant when the displacement amplitude of the excitation is maintained at a constant level. This frequency dependence of nonlinearity is a result of several factors coupling with each other during signal conversion from acceleration to electrical output signal. These factors include the amplification of the proof mass’s amplitude as the excitation frequency approaches resonance, the nonlinearity in capacitance-displacement conversion at larger displacements caused by the fringing effect, and the offset of the mechanical suspension’s equilibrium point from the null position of the differential capacitance electrodes. Through displacement transducer and damping optimization, the second-order nonlinearity coefficient is greatly reduced from mg/g${}^2$ to $\mathsf{\mu }$g/g${}^2$. Full article

The measurements of wafers’ surface profile are crucial for safeguarding the fabrication quality of integrated circuits and MEMS devices. The current techniques measure the profile mainly by moving a capacitive or optical spacing sensing probe along multiple lines, which is high-cost and inefficient. This paper presents the calculation, simulation and experiment of a method for measuring the surface profile with arrayed capacitive spacing transducers. The calculation agreed well with the simulation and experiment. Finally, the proposed method was utilized for measuring the profile of a silicon wafer. The result is consistent with that measured by a commercial instrument. As a movement system is not required, the proposed method is promising for industry applications with superior cost and efficiency to the existing technology. Full article

Compared with airborne gravimetry, a technique frequently used to infer the seafloor topography at places inaccessible to ship soundings due to the presence of ice shelf or ice mélange, airborne gravity gradiometry inherently could achieve higher spatial resolution, thus it is promising for improved inference of seafloor topography. However, its estimation capability has not been demonstrated by real projects. Theoretical analysis through admittance shows that compared with gravity disturbance, gravity gradient is more sensitive to the short-wavelength seafloor topography but diminishes faster with the increase of the distance between the seafloor and airplane, indicating its superiority is recovering short-wavelength topographic features over shallow waters. We present the first numerical experiment that estimates seafloor topography from a 0.4-km resolution, real airborne gravity gradients. It is shown that airborne gravity gradiometry can recover smaller topographic features than typical airborne gravimetry, but the estimation accuracy is only $\pm 17$ m due to the presence of subsurface density variations. The long-wavelength effect of the subsurface density variations can be removed with the aid of constraining bathymetry inside the study area, whereas the short wavelengths cannot. This study expands the applications of airborne gravity gradiometry, and helps glaciologists understand its performance in seafloor topography estimation. Full article

Capacitive MEMS accelerometers with area-variable periodic-electrode displacement transducers found wide applications in disaster monitoring, resource exploration and inertial navigation. The bonding-induced warpage, due to the difference in the coefficients of thermal expansion of the bonded slices, has a negative influence on the precise control of the interelectrode spacing that is essential to the sensitivity of accelerometers. In this work, we propose the theory, simulation and experiment of a method that can alleviate both the stress and the warpage by applying different bonding temperature on the bonded slices. A quasi-zero warpage is achieved experimentally, proving the feasibility of the method. As a benefit of the flat surface, the spacing of the capacitive displacement transducer can be precisely controlled, improving the self-noise of the accelerometer to 6 ng/√Hz @0.07 Hz, which is about two times lower than that of the accelerometer using a uniform-temperature bonding process. Full article

Capacitive transducers are widely used in fundamental physics experiments, seismology, Earth or planetary observations, and space scientific and technical applications because of their high precision, simple structure, and compatibility with various measurements. However, in real applications, there is a trade-off between their resolution and dynamic range. Therefore, this paper is aimed at enlarging the dynamic range while ensuring high resolution. In this paper, a noise analysis of a capacitive transducer is presented, which shows that the amplitude noise of the carrier wave is the main limiting factor. Hence, a new method of generating a carrier wave with lower-amplitude noise is proposed in the paper. Based on the experimental verification, it is found that the carrier wave produced through the new method performed significantly better than the typical digital carrier wave when they were compared in the same sensing circuit. With the carrier wave produced through the new method, the dynamic range of the capacitive transducer can reach 120.7 dB, which is 18.3 dB greater than for the typical direct digital synthesis (DDS) method. In addition, the resolution of the carrier wave is mainly limited by the voltage reference components. Full article

Capacitive sensing is a key technique to measure the test mass movement with a high resolution for space-borne gravitational wave detectors, such as Laser Interferometer Space Antenna (LISA) and TianQin. The capacitance resolution requirement of TianQin is higher than that of LISA, as the arm length of TianQin is about 15 times shorter. In this paper, the transfer function and capacitance measurement noise of the circuit are modeled and analyzed. Figure-of-merits, including the product of the inductance L and the quality factor Q of the transformer, are proposed to optimize the transformer and the capacitance measurement resolution of the circuit. The LQ product improvement and the resonant frequency augmentation are the key factors to enhance the capacitance measurement resolution. We fabricated a transformer with a high LQ product over a wide frequency band. The evaluation showed that the transformer can generate a capacitance resolution of 0.11 aF/Hz^1/2 at a resonant frequency of 200 kHz, and the amplitude of the injection wave would be 0.6 V. This result supports the potential application of the proposed transformer in space-borne gravitational wave detection and demonstrates that it could relieve the stringent requirements for other parameters in the TianQin mission. Full article

Metamaterial-based absorbers have been extensively investigated in the terahertz (THz) range with ever increasing performances. In this paper, we propose an all-dielectric THz absorber based on doped silicon. The unit cell consists of a silicon cross resonator with an internal cross-shaped air cavity. Numerical results suggest that the proposed absorber can operate from THz to far-infrared regimes, having an average power absorption of ∼95% between 0.6 and 10 THz. Experimental results using THz time-domain spectroscopy show a good agreement with simulations. The underlying mechanisms for broadband absorption are attributed to the combined effects of multiple cavities modes formed by silicon resonators and bulk absorption in the doped silicon substrate, as confirmed by simulated field patterns and calculated diffraction efficiency. This ultra-wideband absorption is polarization insensitive and can operate across a wide range of the incident angle. The proposed absorber can be readily integrated into silicon-based photonic platforms and used for sensing, imaging, energy harvesting and wireless communications applications in the THz/IR range. Full article

Rotating Accelerometer Gravity Gradiometers (RAGGs) play a significant role in applications such as resource exploration and gravity aided navigation. Scale factor calibration is an essential procedure for RAGG instruments before being used. In this paper, we propose a calibration system for a gravity gradiometer to obtain the scale factor effectively, even when there are mass disturbance surroundings. In this system, four metal spring-based accelerometers with a good consistency are orthogonally assembled onto a rotary table to measure the spatial variation of the gravity gradient. By changing the approaching pattern of the reference gravity gradient excitation object, the calibration results are generated. Experimental results show that the proposed method can efficiently and repetitively detect a gravity gradient excitation mass weighing 260 kg within a range of 1.6 m and the scale factor of RAGG can be obtained as (5.4 ± 0.2) E/μV, which is consistent with the theoretical simulation. Error analyses reveal that the performance of the proposed calibration scheme is mainly limited by positioning error of the excitation and can be improved by applying higher accuracy position rails. Furthermore, the RAGG is expected to perform more efficiently and reliably in field tests in the future. Full article

A method for automatic compensation of misalignment angles during matching the scale factors of two pairs of the accelerometers in developing the rotating accelerometer gravity gradient instrument (GGI) is proposed and demonstrated in this paper. The purpose of automatic scale factor matching of the four accelerometers in GGI is to suppress the common mode acceleration of the moving-based platforms. However, taking the full model equation of the accelerometer into consideration, the other two orthogonal axes which is the pendulous axis and the output axis, will also sense the common mode acceleration and reduce the suppression performance. The coefficients from the two axes to the output are δ_O and δ_P respectively, called the misalignment angles. The angle δ_O, coupling with the acceleration along the pendulous axis perpendicular to the rotational plane, will not be modulated by the rotation and gives little contribution to the scale factors matching. On the other hand, because of coupling with the acceleration along the centripetal direction in the rotating plane, the angle δ_P would produce a component with 90 degrees phase delay relative to the scale factor component. Hence, the δ_P component coincides exactly with the sensitive direction of the orthogonal accelerometers. To improve the common mode acceleration rejection, the misalignment angle δ_P is compensated by injecting a trimming current, which is proportional to the output of an orthogonal accelerometer, into the torque coil of the accelerometer during the scale factor matching. The experimental results show that the common linear acceleration suppression achieved three orders after the scale factors balance and five orders after the misalignment angles compensation, which is almost down to the noise level of the used accelerometers of 1~2 × 10⁻⁷ g/√Hz (1 g ≈ 9.8 m/s²). Full article

A subnano-g electrostatic force-rebalanced flexure accelerometer is designed for the rotating accelerometer gravity gradient instrument. This accelerometer has a large proof mass, which is supported inversely by two pairs of parallel leaf springs and is centered between two fixed capacitor plates. This novel design enables the proof mass to move exactly along the sensitive direction and exhibits a high rejection ratio at its cross-axis directions. Benefiting from large proof mass, high vacuum packaging, and air-tight sealing, the thermal Brownian noise of the accelerometer is lowered down to less than 0.2 $\mathrm{ng}/\sqrt{\mathrm{Hz}}$ with a quality factor of 15 and a natural resonant frequency of about $7.4\mathrm{Hz}$ . The accelerometer’s designed measurement range is about ±1 mg. Based on the correlation analysis between a commercial triaxial seismometer and our accelerometer, the demonstrated self-noise of our accelerometers is reduced to lower than 0.3 $\mathrm{ng}/\sqrt{\mathrm{Hz}}$ over the frequency ranging from 0.2 to 2 Hz, which meets the requirement of the rotating accelerometer gravity gradiometer. Full article

A new and simple method to adjust the scale factor of a magnetic force feedback accelerometer is presented, which could be used in developing a rotating accelerometer gravity gradient instrument (GGI). Adjusting and matching the acceleration-to-current transfer function of the four accelerometers automatically is one of the basic and necessary technologies for rejecting the common mode accelerations in the development of GGI. In order to adjust the scale factor of the magnetic force rebalance accelerometer, an external current is injected and combined with the normal feedback current; they are then applied together to the torque coil of the magnetic actuator. The injected current could be varied proportionally according to the external adjustment needs, and the change in the acceleration-to-current transfer function then realized dynamically. The new adjustment method has the advantages of no extra assembly and ease of operation. Changes in the scale factors range from 33% smaller to 100% larger are verified experimentally by adjusting the different external coefficients. The static noise of the used accelerometer is compared under conditions with and without the injecting current, and the experimental results find no change at the current noise level, which further confirms the validity of the presented method. Full article

Encoder-like micro area-changed capacitive transducers are advantageous in terms of their better linearity and larger dynamic range compared to gap-changed capacitive transducers. Such transducers have been widely applied in rectilinear and rotational position sensors, lab-on-a-chip applications and bio-sensors. However, a complete model accounting for both the parasitic capacitance and fringe effect in area-changed capacitive transducers has not yet been developed. This paper presents a complete model for this type of transducer applied to a high-resolution micro accelerometer that was verified by both simulations and experiments. A novel optimization method involving the insertion of photosensitive polyimide was used to reduce the parasitic capacitance, and the capacitor spacing was decreased to overcome the fringe effect. The sensitivity of the optimized transducer was approximately 46 pF/mm, which was nearly 40 times higher than that of our previous transducer. The displacement detection resolution was measured as 50 pm/√Hz at 0.1 Hz using a precise capacitance detection circuit. Then, the transducer was applied to a sandwich in-plane micro accelerometer, and the measured level of the accelerometer was approximately 30 ng/√Hz at 1Hz. The earthquake that occurred in Taiwan was also detected during a continuous gravity measurement. Full article