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Proceedings 2017, 1(4), 584; doi:10.3390/proceedings1040584

Bulk PZT Cantilever Based MEMS Acoustic Transducer for Cochlear Implant Applications

1
METU-MEMS Research and Application Center, Middle East Technical University, Ankara, Turkey
2
Micro Nano Technology Graduate Program, Middle East Technical University, Ankara, Turkey
3
Department of Electrical and Electronics Engineering, Middle East Technical University, Ankara, Turkey
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
*
Author to whom correspondence should be addressed.
Published: 11 August 2017
Download PDF [685 KB, uploaded 6 September 2017]

Abstract

This paper presents the first acoustic experimental results of a MEMS based bulk piezoelectric transducer for use in fully implantable cochlear implants (FICI). For this purpose, the transducer was attached onto an acoustically vibrating membrane. Sensing and energy harvesting performances were measured using neural stimulation and rectifier circuits, respectively. The chip has a 150 Hz bandwidth around 1800 Hz resonance frequency that is suitable for mechanical filtering as a sensor. As an energy harvester, bulk piezoelectric transducer generated a rectified power of 16.25 μW with 2.47 VDC with 120 dB-A sound input at 1780 Hz. Among other MEMS acoustic energy harvesters in the literature, reported transducer has the highest power density (1.5 × 10−3 W/cm3) to our knowledge.
Keywords: energy harvesting; bulk PZT; acoustic energy harvesting; cochlear implants energy harvesting; bulk PZT; acoustic energy harvesting; cochlear implants
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Koyuncuoğlu, A.; İlik, B.; Chamanian, S.; Uluşan, H.; Ashrafi, P.; Işık, D.; Külah, H. Bulk PZT Cantilever Based MEMS Acoustic Transducer for Cochlear Implant Applications. Proceedings 2017, 1, 584.

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