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Proceedings 2017, 1(4), 394; doi:10.3390/proceedings1040394

Sensitivity of Piezoelectric Ultrasonic Microsensors with Sol-Gel Derived PZT Films Prepared through Various Pyrolysis Temperatures

Graduate School of Science and Technology, Kyoto Institute of Technology, Kyoto 606-8585, Japan
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
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Published: 11 August 2017
(This article belongs to the Proceedings of Eurosensors 2017)
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Abstract

Sensitivity of piezoelectric-diaphragm type ultrasonic microsensors were investigated with sol-gel derived lead-zirconate-titanate (PZT) films prepared through various pyrolysis temperatures. The residual stress of the PZT film should be precisely controlled because the sensor diaphragms show static deflection by buckling and highly sensitive sensors have been realized on upward-buckled diaphragms whose buckling direction and deflection are determined by the stress. The films were prepared under pyrolysis temperatures in the range from 250 °C to 400 °C and for (100)- or (111)-orientation. Higher pyrolysis temperature resulted in lower film stress and larger buckling deflection of the diaphragms. The (111)-oriented films showed the higher sensitivity in the higher pyrolysis temperatures. The (100)-oriented films, however, showed the highest sensitivity in the lowest pyrolysis temperature (250 °C).
Keywords: PZT; sol-gel; pyrolysis temperature; residual stress; crystallographic orientation; ultrasonic sensor; sensitivity; diaphragm; buckling PZT; sol-gel; pyrolysis temperature; residual stress; crystallographic orientation; ultrasonic sensor; sensitivity; diaphragm; buckling
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Yamashita, K.; Nakajima, S.; Shiomi, J.; Noda, M. Sensitivity of Piezoelectric Ultrasonic Microsensors with Sol-Gel Derived PZT Films Prepared through Various Pyrolysis Temperatures. Proceedings 2017, 1, 394.

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