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Proceedings 2017, 1(4), 561; doi:10.3390/proceedings1040561

Piezoelectrically Driven and Sensed Micromirrors with Extremely Large Scan Angles and Precise Closed-Loop Control

MEMS Application, Fraunhofer Institute for Silicon Technology, Itzehoe 25524, Germany
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
Author to whom correspondence should be addressed.
Published: 16 August 2017
(This article belongs to the Proceedings of Eurosensors 2017)
Download PDF [864 KB, uploaded 16 August 2017]


This paper reports piezoelectrically driven and sensed micromirrors achieving extremely large total optical scan angle of 106° and high frequency of 45 kHz at 22 V. To reach such large angles, extensive FEM-simulations relating to fracture strength of poly-Si, of which these micromirrors primarily consist, have been performed. Meanwhile, high Q-factor of more than 5000 under ambient conditions and low power consumption of 10.3 mW were measured. Moreover the piezoelectric elements enable position sensing and based on the feedback signals closed-loop control has been developed.
Keywords: micromirror; piezoelectric; closed-loop control; fracture behavior micromirror; piezoelectric; closed-loop control; fracture behavior
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Gu-Stoppel, S.; Giese, T.; Quenzer, H.-J.; Hofmann, U.; Benecke, W. Piezoelectrically Driven and Sensed Micromirrors with Extremely Large Scan Angles and Precise Closed-Loop Control. Proceedings 2017, 1, 561.

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