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Proceedings 2017, 1(4), 290; doi:10.3390/proceedings1040290

Fabrication of ZnO Nanorods on MEMS Piezoresistive Silicon Microcantilevers for Environmental Monitoring

1
TU Braunschweig, Department of Semiconductor Technology, Braunschweig, Germany
2
Laboratory for Emerging Nanometrology (LENA), Braunschweig, Germany
3
Inorganic Chemistry Department, National Research Centre (NRC), Cairo, Egypt
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
*
Author to whom correspondence should be addressed.
Published: 16 August 2017
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Abstract

In this study, a ZnO nanorods (NRs) patterned MEMS piezoresistive silicon micro-cantilever was fabricated as environmental monitor. The fabrication starts from bulk silicon, utilizing photolithography, diffusion, inductively coupled plasma (ICP) cryogenic dry etching, Zinc DC-sputtering, and chemical bath deposition (CBD) etc. This sensor shows a humidity sensitivity value of 6.35 ± 0.27 ppm/RH% at 25 °C in the range from 30% RH to 80% RH.
Keywords: MEMS; Micro-cantilever; ZnO nanorods; seed layer; environmental sensor MEMS; Micro-cantilever; ZnO nanorods; seed layer; environmental sensor
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Xu, J.; Bertke, M.; Gad, A.; Yu, F.; Hamdana, G.; Bakin, A.; Peiner, E. Fabrication of ZnO Nanorods on MEMS Piezoresistive Silicon Microcantilevers for Environmental Monitoring. Proceedings 2017, 1, 290.

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