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Proceedings 2017, 1(4), 554; doi:10.3390/proceedings1040554

A Lorentz Force Actuated Continuous Deformable Polymer Mirror for Wavefront Control

Department of Electrical and Computer Engineering, University of Manitoba, Winnipeg, MB, Canada
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
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Published: 11 August 2017
Download PDF [1005 KB, uploaded 12 October 2017]

Abstract

This paper describes MEMS deformable polymer mirror system for adaptive optics application. This system employs a 4 µm thick SU-8 membrane with a stress balanced double side aluminum coating as a mirror element. Underlying Lorentz actuators are used to control the surface topography of the mirror, enabling optical wavefront correction. Compared to electrostatic, piezoelectric, and thermal actuators, the Lorentz actuators offer low voltage drive (<1 V), high deflection, and bi-directional motion. Mirror deflection of up to 45 µm was demonstrated, with lower deflections of 10 µm achieved with actuator heating below 10 °C.
Keywords: adaptive optics; deformable polymer mirror (DPM); microelectromechanical system (MEMS); optical distortion adaptive optics; deformable polymer mirror (DPM); microelectromechanical system (MEMS); optical distortion
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Park, B.; Afsharipour, E.; Shafai, C. A Lorentz Force Actuated Continuous Deformable Polymer Mirror for Wavefront Control. Proceedings 2017, 1, 554.

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