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Proceedings 2017, 1(4), 546; doi:10.3390/proceedings1040546

A Novel Gyroscopic Actuation Concept for 2D MEMS Micromirrors

1
Robert Bosch GmbH, Automotive Electronics, Reutlingen, Germany
2
Technical University of Chemnitz, Chemnitz, Germany
3
Fraunhofer Institute for Electronic Nano Systems (ENAS), Chemnitz, Germany
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
*
Author to whom correspondence should be addressed.
Published: 9 August 2017
Download PDF [797 KB, uploaded 5 September 2017]

Abstract

In this paper we present a novel approach to achieve indirect quasistatic deflection of 2D MEMS scanning micromirrors by solely resonant excitation utilizing gyroscopic effects. Therefore the micromirror is set to oscillate in its mirror plane additionally to its primary resonant oscillation with a similar frequency. According to angular momentum conservation this leads to a quasistatic deflection along a third axis orthogonal to the former. To investigate the applicability to MEMS micromirrors we develop a reference MEMS design to be used for fully transient FEM simulation. To achieve consistent simulation results we further develop a closed loop control algorithm. We then perform simulations using this method to prove the viability of the proposed concept
Keywords: MOEMS; micromirror; indirect actuation; ansys; transient simulation MOEMS; micromirror; indirect actuation; ansys; transient simulation
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Kaupmann, P.; Pinter, S.; Franz, J.; Streiter, R.; Otto, T. A Novel Gyroscopic Actuation Concept for 2D MEMS Micromirrors. Proceedings 2017, 1, 546.

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