MEMS Inertial Switch for Military Applications†
AbstractWe developed a MEMS inertial switch (hereafter, the switch) for an ignition system of missiles. The developed switch consists of four folded beams and a plate suspended by the beams, analogous to a well-known spring-mass system. The plate and four beams compose a single body, which is made from single crystalline silicon wafers by deep reactive ion etching techniques. This process gives high thermal stability and stress-free structure. The switching, either open or close a conductive path, is achieved by the movement of the plate suspended with four folded beams when the acceleration exceeds a predetermined threshold. With a spinning-rate table, the function of the switch was tested at various revolution speeds. The test results are compared with the calculation results by our analytical model.
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Lee, H.-N.; Jang, S.-G.; Lee, S.; Lee, J.-S.; Hwang, Y.-S. MEMS Inertial Switch for Military Applications. Proceedings 2017, 1, 343.
Lee H-N, Jang S-G, Lee S, Lee J-S, Hwang Y-S. MEMS Inertial Switch for Military Applications. Proceedings. 2017; 1(4):343.Chicago/Turabian Style
Lee, Hyo-Nam; Jang, Seung-Gyo; Lee, Sungryeol; Lee, Jeong-Sun; Hwang, Young-Suk. 2017. "MEMS Inertial Switch for Military Applications." Proceedings 1, no. 4: 343.
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