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Proceedings 2017, 1(4), 539; doi:10.3390/proceedings1040539

Integration of Graphene on AlN Based High Frequency Resonators and Their Functionalization for Biosensing

1
GMME-CEMDATIC, ETSI de Telecomunicación, Universidad Politécnica de Madrid, 28040 Madrid, Spain
2
Confocal Microscopy Unit, Spanish National Cancer Research Centre (CNIO), 28029 Madrid, Spain
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
*
Author to whom correspondence should be addressed.
Published: 7 August 2017
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Abstract

We present the successful integration of graphene on top of AlN-based solidly mounted resonators (SMRs), using a low temperature CVD process and Ni layers as catalyst. We develop a protocol to functionalize the surface of the resonators that starts with a low damage O2 radical plasma treatment of the surface of the devices that introduces a controlled density of defects on the graphene. Then, EDC/NHS chemistry is used to covalently bond streptavidin molecules to the surface of the sensors. Finally, the functionalised biosensors are assessed by analysing their response to biotinylated antibodies.
Keywords: gravimetric biosensor; graphene integration; surface functionalization; molecule detection gravimetric biosensor; graphene integration; surface functionalization; molecule detection
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Marco, B.; Gordillo, L.; Escolano, J.M.; Olivares, J.; Clement, M.; Mejias, D.; Iborra, E. Integration of Graphene on AlN Based High Frequency Resonators and Their Functionalization for Biosensing. Proceedings 2017, 1, 539.

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