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Proceedings 2017, 1(4), 445; doi:10.3390/proceedings1040445

Low Temperature CVD Grown Graphene for Highly Selective Gas Sensors Working under Ambient Conditions

1
Delft University of Technology, Delft, The Netherlands
2
ENEA, Portici (Napoli), Italy
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
*
Author to whom correspondence should be addressed.
Published: 16 August 2017
Download PDF [456 KB, uploaded 17 August 2017]

Abstract

In this paper we report on gas sensors based on graphene grown by Chemical Vapor Deposition at 850 °C. Mo was used as catalyst for graphene nucleation. Resistors were directly designed on pre-patterned Mo using the transfer-free process we recently developed, thus avoiding films damage during the transfer to the target substrate. Devices operating at room temperature and relative humidity set at 50% were tested towards NO2. The sensors resulted to be highly specific towards NO2 and showed current variation up to 6%. The performances were compared with those of gas sensors based on graphene grown at 980 °C, which represents the usual growth temperature for such material. The findings show that by lowering the graphene growth temperature and consequently the energy consumptions the sensing benefits of these devices are still preserved.
Keywords: gas sensors; NO2; environmental conditions; graphene; chemical vapor deposition; transfer-free process gas sensors; NO2; environmental conditions; graphene; chemical vapor deposition; transfer-free process
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Ricciardella, F.; Vollebregt, S.; Polichetti, T.; Alfano, B.; Massera, E.; Sarro, P.M. Low Temperature CVD Grown Graphene for Highly Selective Gas Sensors Working under Ambient Conditions. Proceedings 2017, 1, 445.

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