Development of All-Around SiO2/Al2O3 Gate, Suspended Silicon Nanowire Chemical Field Effect Transistors Si-nw-ChemFET†
AbstractWe present a sensor platform associated to silicon-nanowire chemical field effect transistors (Si-nw-ChemFET). Innovations concern the use of networks of suspended silicon N+/P/N+ nanowires as conducting channel, the realization by thermal oxidation and Atomic-Layer Deposition (ALD) of a SiO2/Al2O3 gate insulator all-around the silicon nanowires, and their final integration into covered SU8-based microfluidic channels. The Si-nw-MOSFET/ChemFET fabrication process and electrical/electrochemical characterizations are presented. The fabrication process did not need an expensive and time-consuming e-beam lithography, but only fast and “low cost” standard photolithography protocols. Such microdevice will provide new opportunities for bio-chemical analysis at the micro/nanoscale.
Scifeed alert for new publicationsNever miss any articles matching your research from any publisher
- Get alerts for new papers matching your research
- Find out the new papers from selected authors
- Updated daily for 49'000+ journals and 6000+ publishers
- Define your Scifeed now
Lale, A.; Grappin, A.; Mazenq, L.; Bourrier, D.; Lecestre, A.; Launay, J.; Temple-Boyer, P. Development of All-Around SiO2/Al2O3 Gate, Suspended Silicon Nanowire Chemical Field Effect Transistors Si-nw-ChemFET. Proceedings 2017, 1, 419.
Lale A, Grappin A, Mazenq L, Bourrier D, Lecestre A, Launay J, Temple-Boyer P. Development of All-Around SiO2/Al2O3 Gate, Suspended Silicon Nanowire Chemical Field Effect Transistors Si-nw-ChemFET. Proceedings. 2017; 1(4):419.Chicago/Turabian Style
Lale, Ahmet; Grappin, Auriane; Mazenq, Laurent; Bourrier, David; Lecestre, Aurélie; Launay, Jérôme; Temple-Boyer, Pierre. 2017. "Development of All-Around SiO2/Al2O3 Gate, Suspended Silicon Nanowire Chemical Field Effect Transistors Si-nw-ChemFET." Proceedings 1, no. 4: 419.
Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.