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Proceedings 2017, 1(4), 393; doi:10.3390/proceedings1040393

The First Frequency-Modulated (FM) Pitch Gyroscope

1
Department of Civil and Environmental Engineering, Politecnico di Milano, Milan 20133, Italy
2
Department of Electronics, Information and Bioengineering, Politecnico di Milano, Milan 20133, Italy
3
STMicroelectronics, AMG, Cornaredo 20010, Italy
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
*
Author to whom correspondence should be addressed.
Published: 8 August 2017
(This article belongs to the Proceedings of Eurosensors 2017)
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Abstract

In this work, the mechanical design and the experimental validation of a micro-electromechanical frequency-modulated (FM) pitch gyroscope are presented. The proposed device is fabricated through the ThELMA © surface micromachining process of STMicroelectronics and it represents, to the authors’ knowledge, the first small-footprint (690 µm × 946 µm) prototype of FM gyroscope able to measure an in-plane angular rate. The measured scale factor, defined as the mean angular gain, equals 0.973 Hz/Hz, in close agreement with theoretical predictions. It depends only on the mass distribution in the mechanical structure and is, consequently, not influenced by environmental fluctuations.
Keywords: MEMS; frequency modulation (FM); pitch gyroscope MEMS; frequency modulation (FM); pitch gyroscope
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Zega, V.; Minotti, P.; Mussi, G.; Tocchio, A.; Falorni, L.; Facchinetti, S.; Bonfanti, A.; Lacaita, A.L.; Comi, C.; Langfelder, G.; Corigliano, A. The First Frequency-Modulated (FM) Pitch Gyroscope. Proceedings 2017, 1, 393.

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