The First Frequency-Modulated (FM) Pitch Gyroscope†
AbstractIn this work, the mechanical design and the experimental validation of a micro-electromechanical frequency-modulated (FM) pitch gyroscope are presented. The proposed device is fabricated through the ThELMA © surface micromachining process of STMicroelectronics and it represents, to the authors’ knowledge, the first small-footprint (690 µm × 946 µm) prototype of FM gyroscope able to measure an in-plane angular rate. The measured scale factor, defined as the mean angular gain, equals 0.973 Hz/Hz, in close agreement with theoretical predictions. It depends only on the mass distribution in the mechanical structure and is, consequently, not influenced by environmental fluctuations.
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Zega, V.; Minotti, P.; Mussi, G.; Tocchio, A.; Falorni, L.; Facchinetti, S.; Bonfanti, A.; Lacaita, A.L.; Comi, C.; Langfelder, G.; Corigliano, A. The First Frequency-Modulated (FM) Pitch Gyroscope. Proceedings 2017, 1, 393.
Zega V, Minotti P, Mussi G, Tocchio A, Falorni L, Facchinetti S, Bonfanti A, Lacaita AL, Comi C, Langfelder G, Corigliano A. The First Frequency-Modulated (FM) Pitch Gyroscope. Proceedings. 2017; 1(4):393.Chicago/Turabian Style
Zega, Valentina; Minotti, Paolo; Mussi, Giorgio; Tocchio, Alessandro; Falorni, Luca; Facchinetti, Stefano; Bonfanti, Andrea; Lacaita, Andrea L.; Comi, Claudia; Langfelder, Giacomo; Corigliano, Alberto. 2017. "The First Frequency-Modulated (FM) Pitch Gyroscope." Proceedings 1, no. 4: 393.