Mechanical Characterization of (La,Sr)MnO3 Microbridges for Thermometric Applications†
AbstractMicroElectroMechanical Systems (MEMS) made of heterostructures of crystalline oxide materials with targeted physical properties may be applied as sensors having different integrated functionalities. In this work, we explore the feasibility of manganite thin film based epitaxial MEMS for thermometric micromechanical sensing. We investigate the mechanical properties of La1−xSrxMnO3, with x ≈ 1/3, freestanding microbridges as a function of temperature for applications in the field of micromechanical temperature sensors.
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Remaggi, F.; Pellegrino, L.; Manca, N.; Bernini, C.; Marré, D. Mechanical Characterization of (La,Sr)MnO3 Microbridges for Thermometric Applications. Proceedings 2017, 1, 365.
Remaggi F, Pellegrino L, Manca N, Bernini C, Marré D. Mechanical Characterization of (La,Sr)MnO3 Microbridges for Thermometric Applications. Proceedings. 2017; 1(4):365.Chicago/Turabian Style
Remaggi, Federico; Pellegrino, Luca; Manca, Nicola; Bernini, Cristina; Marré, Daniele. 2017. "Mechanical Characterization of (La,Sr)MnO3 Microbridges for Thermometric Applications." Proceedings 1, no. 4: 365.
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