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Proceedings 2017, 1(4), 346; doi:10.3390/proceedings1040346

A Comb-Based Capacitive MEMS Microphone with High Signal-to-Noise Ratio: Modeling and Noise-Level Analysis

Institute for Physics of Electrotechnology at Technical University of Munich, 80333 Munich, Germany
Infineon Technologies AG, 85579 Neubiberg, Germany
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
Author to whom correspondence should be addressed.
Published: 8 August 2017
(This article belongs to the Proceedings of Eurosensors 2017)
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We present a physics-based system-level model for optimizing a novel comb-based capacitive MEMS microphone towards high signal-to-noise ratios. The model includes non-linear coupling effects between the electrodes as well as the physical dependencies on relevant design parameters, thus enabling predictive statements w.r.t. the device performance. It is calibrated and validated by finite element simulations and laser Doppler vibrometer measurements of first prototypes. Being formulated as a generalized Kirchhoffian network, it can be implemented in a standard circuit simulation tool. The predicted signal-to-noise ratio of this concept reaches up to 78 dB(A), which significantly exceeds state-of-the-art devices.
Keywords: capacitive comb microphone; system-level simulation; noise; signal-to-noise-ratio capacitive comb microphone; system-level simulation; noise; signal-to-noise-ratio
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Anzinger, S.; Manz, J.; Dehe, A.; Schrag, G. A Comb-Based Capacitive MEMS Microphone with High Signal-to-Noise Ratio: Modeling and Noise-Level Analysis. Proceedings 2017, 1, 346.

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