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Proceedings 2017, 1(4), 294; doi:10.3390/proceedings1040294

VO2: A Phase Change Material for Micromechanics

1
Kavli Institute of Nanoscience, Delft University of Technology, 2628 CJ Delft, The Netherlands
2
Physics Department, University of Genova, 16146 Genova, Italy
3
CNR-SPIN, 16152 Genova, Italy
4
Institute of Scientific and Industrial Research, Osaka University, 567-0047 Osaka, Japan
Presented at the Eurosensors 2017 Conference, Paris, France, 3–6 September 2017.
*
Author to whom correspondence should be addressed.
Published: 11 August 2017
Download PDF [588 KB, uploaded 11 October 2017]

Abstract

Micro- and nano-mechanical systems may take advantage from using materials having multiple functional characteristics. VO2 is a compound characterised by a solid state phase transition (SSPT) just above room temperature, consisting in a concurrent metal-insulator transition and a change of lattice symmetry and parameters. Here, the combination of non-linear electrical response and structural changes is employed to realise a novel high-frequency mechanical actuation scheme, showing direct conversion from DC voltage to mechanical excitation in the MHz range and selective activation of the different mechanical modes of a microstructure.
Keywords: mechanical oscillators; Vanadium dioxide; MEMS mechanical oscillators; Vanadium dioxide; MEMS
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Manca, N.; Pellegrino, L.; Kanki, T.; Venstra, W.J.; Mattoni, G.; Higuchi, Y.; Tanaka, H.; Caviglia, A.D.; Marré, D. VO2: A Phase Change Material for Micromechanics. Proceedings 2017, 1, 294.

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