Analysis, Design, and Control of a Novel Elastomeric Bearing Positioning Stage
Abstract
:1. Introduction
2. Methods
2.1. Approach
2.2. Stage Design and Realization
2.3. Dynamic Testing and Modeling of the Stage
2.3.1. Stage Model
2.3.2. Stress Relaxation Experiment
2.3.3. Damping Coefficient Experiment
2.4. Controller Design
2.4.1. Proportional–Integral–Derivative (PID) Controller
2.4.2. Integral Sliding Mode Controller
3. Results
3.1. Step Response
3.2. Sinusoidal Motion Tracking
3.3. Robustness Test
4. Discussion
5. Conclusions
Acknowledgments
Author Contributions
Conflicts of Interest
References
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C (N·s/m) | k1 (N/m) | k2 (N/m) | k3 (N/m) | c2 (N·s/m) | c3 (N·s/m) |
---|---|---|---|---|---|
800 | 3.86 × 105 | 6.3 × 104 | 4.4 × 104 | 504 | 101,200 |
Performance | PID | ISMC |
---|---|---|
Steady State Error (nm) | 13 | 203 |
Overshoot (%) | 1.9 | 2.01 |
Rise Time (ms) | 9 | 6 |
Settling Time (ms) | 20 | 29 |
Bandwidth (Hz) | 27 | 350 |
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Teng, Y.-C.; Chen, K.-S. Analysis, Design, and Control of a Novel Elastomeric Bearing Positioning Stage. Inventions 2016, 1, 17. https://doi.org/10.3390/inventions1030017
Teng Y-C, Chen K-S. Analysis, Design, and Control of a Novel Elastomeric Bearing Positioning Stage. Inventions. 2016; 1(3):17. https://doi.org/10.3390/inventions1030017
Chicago/Turabian StyleTeng, Yen-Chu, and Kuo-Shen Chen. 2016. "Analysis, Design, and Control of a Novel Elastomeric Bearing Positioning Stage" Inventions 1, no. 3: 17. https://doi.org/10.3390/inventions1030017