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Magnetochemistry 2018, 4(1), 7; doi:10.3390/magnetochemistry4010007

Fabrication of Magnetically Driven Microvalve Arrays Using a Photosensitive Composite

Department of Mechanical Engineering, Yamaguchi University, 2-16-1 Tokiwadai, Ube, Yamaguchi 755-8611, Japan
Department of Intelligent Mechanical Systems Engineering, Kagawa University, 2217-20 Hayashi-cho, Takamatsu, Kagawa 761-0396, Japan
Department of Micro Engineering, Kyoto University, Kyoto Daigaku-Katsura, Nishikyo-ku, Kyoto 615-8540, Japan
Division of Mechanical Science of Technology, Gunma University, 1-5-1 Tenjin-cho, Kiryu, Gunma 376-8515, Japan
JST, PRESTO, 4-1-8 Honcho, Kawaguchi, Saitama 332-0012, Japan
Author to whom correspondence should be addressed.
Received: 30 November 2017 / Revised: 22 December 2017 / Accepted: 2 January 2018 / Published: 6 January 2018
(This article belongs to the Special Issue Magnetic Fields in Microfluidic Systems)
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Microvalves play an important role in fluid control in micro total analysis systems (µTAS). Previous studies have reported complex fabrication processes for making microvalve elements in a channel. Hence, there is a need for a simpler microvalve fabrication method for achieving throughput improvement and cost reduction in µTAS. In this study, we propose a simple fabrication method for a magnetically driven microvalve array using a photosensitive composite. The composite was prepared by mixing a photoresist and magnetic particles of pure iron. The simple fabrication process was performed by using a laminating layer composed of a sacrificial part and the composite in a channel. The microvalve elements were fabricated by one-step photolithography using the processability of the sacrificial layer and composite. Further, we demonstrated the magnetic driving property of the fabricated microvalve array device. Compared to devices containing non-driving microvalves, the flow rate was decreased by 50%, and the pressure difference between the inlet and outlet increased by up to 4 kPa with increase in driving microvalve elements. These results imply that our proposed device could be useful for practical µTAS applications. View Full-Text
Keywords: MEMS; µTAS; microfluidic system; microvalve; magnetic particle; photosensitive composite MEMS; µTAS; microfluidic system; microvalve; magnetic particle; photosensitive composite

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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Nakahara, T.; Suzuki, J.; Hosokawa, Y.; Shimokawa, F.; Kotera, H.; Suzuki, T. Fabrication of Magnetically Driven Microvalve Arrays Using a Photosensitive Composite. Magnetochemistry 2018, 4, 7.

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