Fabrication of Magnetically Driven Microvalve Arrays Using a Photosensitive Composite
AbstractMicrovalves play an important role in fluid control in micro total analysis systems (µTAS). Previous studies have reported complex fabrication processes for making microvalve elements in a channel. Hence, there is a need for a simpler microvalve fabrication method for achieving throughput improvement and cost reduction in µTAS. In this study, we propose a simple fabrication method for a magnetically driven microvalve array using a photosensitive composite. The composite was prepared by mixing a photoresist and magnetic particles of pure iron. The simple fabrication process was performed by using a laminating layer composed of a sacrificial part and the composite in a channel. The microvalve elements were fabricated by one-step photolithography using the processability of the sacrificial layer and composite. Further, we demonstrated the magnetic driving property of the fabricated microvalve array device. Compared to devices containing non-driving microvalves, the flow rate was decreased by 50%, and the pressure difference between the inlet and outlet increased by up to 4 kPa with increase in driving microvalve elements. These results imply that our proposed device could be useful for practical µTAS applications. View Full-Text
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Nakahara, T.; Suzuki, J.; Hosokawa, Y.; Shimokawa, F.; Kotera, H.; Suzuki, T. Fabrication of Magnetically Driven Microvalve Arrays Using a Photosensitive Composite. Magnetochemistry 2018, 4, 7.
Nakahara T, Suzuki J, Hosokawa Y, Shimokawa F, Kotera H, Suzuki T. Fabrication of Magnetically Driven Microvalve Arrays Using a Photosensitive Composite. Magnetochemistry. 2018; 4(1):7.Chicago/Turabian Style
Nakahara, Tasuku; Suzuki, Junya; Hosokawa, Yuki; Shimokawa, Fusao; Kotera, Hidetoshi; Suzuki, Takaaki. 2018. "Fabrication of Magnetically Driven Microvalve Arrays Using a Photosensitive Composite." Magnetochemistry 4, no. 1: 7.
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