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Photonics 2017, 4(2), 34; doi:10.3390/photonics4020034

Evanescently Coupled Rectangular Microresonators in Silicon-on-Insulator with High Q-Values: Experimental Characterization

1
Faculty of Science and Engineering, Waseda University, Shinjuku, Tokyo 169-8555, Japan
2
Research & Development Center, Oki Electric Industry Co., Ltd., Warabi, Saitama 335-8510, Japan
*
Author to whom correspondence should be addressed.
Received: 13 March 2017 / Revised: 22 April 2017 / Accepted: 24 April 2017 / Published: 27 April 2017
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Abstract

We report on evanescently coupled rectangular microresonators with dimensions up to 20 × 10 μm2 in silicon-on-insulator in an add-drop filter configuration. The influence of the geometrical parameters of the device was experimentally characterized and a high Q value of 13,000 was demonstrated as well as the multimode optical resonance characteristics in the drop port. We also show a 95% energy transfer between ports when the device is operated in TM-polarization and determine the full symmetry of the device by using an eight-port configuration, allowing the drop waveguide to be placed on any of its sides, providing a way to filter and route optical signals. We used the FDTD method to analyze the device and e-beam lithography and dry etching techniques for fabrication. View Full-Text
Keywords: rectangular microresonators; silicon-on-insulator; photonic devices rectangular microresonators; silicon-on-insulator; photonic devices
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Mendez-Astudillo, M.; Okayama, H.; Nakajima, H. Evanescently Coupled Rectangular Microresonators in Silicon-on-Insulator with High Q-Values: Experimental Characterization. Photonics 2017, 4, 34.

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