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Fibers 2016, 4(3), 24; doi:10.3390/fib4030024

Development of Touch Probing System Using a Fiber Stylus

1
Department of Mechanical Systems Engineering, Faculty of Environmental Engineering, The University of Kitakyushu, 1-1 Hibikino, Wakamatsu-ku, Kitakyushu, Fukuoka 808-0135, Japan
2
Department of Mechanical Engineering, Faculty of Engineering, Kyushu University, 744 Motooka, Nishi-ku, Fukuoka 819-0395, Japan
*
Author to whom correspondence should be addressed.
Academic Editor: Torsten Frosch
Received: 24 May 2016 / Accepted: 23 July 2016 / Published: 11 August 2016
(This article belongs to the Special Issue Optical Fiber Sensors)

Abstract

This paper presents a system that can be used for micro-hole measurement; the system comprises an optical fiber stylus that is 5 µm in diameter. The stylus deflects when it comes into contact with the measured surface; this deflection is measured optically. In this study, the design parameters of the optical system are determined using a ray-tracing method, and a prototype of the probing system is fabricated to verify ray-tracing simulation results; furthermore, the performance of the system is evaluated experimentally. The results show that the design parameters of this system can be determined using ray-tracing; the resolution of the measurement system using this shaft was approximately 3 nm, and the practicality of this system was confirmed by measuring the shape of a micro-hole 100 µm in diameter and 475 µm in depth. View Full-Text
Keywords: micro-coordinate measuring machine; measurement; fiber stylus; laser diode; micro-hole micro-coordinate measuring machine; measurement; fiber stylus; laser diode; micro-hole
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Murakami, H.; Katsuki, A.; Sajima, T. Development of Touch Probing System Using a Fiber Stylus. Fibers 2016, 4, 24.

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