Optical Gratings Coated with Thin Si3N4 Layer for Efficient Immunosensing by Optical Waveguide Lightmode Spectroscopy
Abstract
:1. Introduction
Si3N4 | SiO2 | TiO2 | Ta2O5 | HfO2 | |
---|---|---|---|---|---|
Refractive index | 2.02 [16] | 1.46 [16] | 2.58 [17] | 2.10 [12] | 2.08 [18] |
Leakage current (A/cm2) at 2 V | 1 × 10−15 [19] | 1 × 10−8 [19] | >1 × 10−7 [20] | 9 × 10−8 [21] | 2 × 10−9 [18] |
Dielectric constant | 7.5 [14] | 3.9 [14] | 80–30 [20] | 26.0 [21] | 25.0 [18] |
2. Experimental Section
2.1. Materials and Reagents
2.2. OWLS Transducer and Measuring Principle
2.3. Silicon Nitride Deposition and Characterization
2.4. Atomic Force Microscopy Surface Characterization
2.5. Immunosensing Analytical Procedure
3. Results and Discussion
3.1. Silicon Nitride Thin Layer Characterization
3.2. Silicon Nitride-Coated OWLS Sensor Chip: Atomic Force Microscopy and OWLS Performance Characterization
3.3. Immunosensor: Proof of Concept
4. Conclusions
Acknowledgments
References
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Diéguez, L.; Caballero, D.; Calderer, J.; Moreno, M.; Martínez, E.; Samitier, J. Optical Gratings Coated with Thin Si3N4 Layer for Efficient Immunosensing by Optical Waveguide Lightmode Spectroscopy. Biosensors 2012, 2, 114-126. https://doi.org/10.3390/bios2020114
Diéguez L, Caballero D, Calderer J, Moreno M, Martínez E, Samitier J. Optical Gratings Coated with Thin Si3N4 Layer for Efficient Immunosensing by Optical Waveguide Lightmode Spectroscopy. Biosensors. 2012; 2(2):114-126. https://doi.org/10.3390/bios2020114
Chicago/Turabian StyleDiéguez, Lorena, David Caballero, Josep Calderer, Mauricio Moreno, Elena Martínez, and Josep Samitier. 2012. "Optical Gratings Coated with Thin Si3N4 Layer for Efficient Immunosensing by Optical Waveguide Lightmode Spectroscopy" Biosensors 2, no. 2: 114-126. https://doi.org/10.3390/bios2020114