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Biosensors 2012, 2(2), 114-126; doi:10.3390/bios2020114

Optical Gratings Coated with Thin Si3N4 Layer for Efficient Immunosensing by Optical Waveguide Lightmode Spectroscopy

1,2,†,* , 1,2,3,‡
1 Department of Electronics, University of Barcelona, C/Martí i Franquès 1, Barcelona, ES 08028, Spain 2 Nanobioengineering Group, Institute for Bioengineering of Catalonia (IBEC), C/Baldiri Reixac 10-12, Barcelona, ES 08028, Spain 3 Networking Research Center on Bioengineering, Biomaterials and Nanomedicine (CIBER-BBN), C/María de Luna 11, Edificio CEEI, Zaragoza, ES 50018, Spain 4 Electronic Engineering Department, Universitat Politècnica de Catalunya, Campus Nord, Barcelona, ES 08034, Spain Current Address: Ian Wark Research Institute (IWRI), University of South Australia, Mawson Lakes Boulevard, Mawson Lakes, SA 5095, Australia Current Address: Institut de Science et d’Ingénierie Supramoléculaires (ISIS), Université de Strasbourg, 8 allée Gaspard Monge, BP 70028, Strasbourg, Cedex, FR 67083, France
* Author to whom correspondence should be addressed.
Received: 1 February 2012 / Revised: 14 March 2012 / Accepted: 5 April 2012 / Published: 10 April 2012
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New silicon nitride coated optical gratings were tested by means of Optical Waveguide Lightmode Spectroscopy (OWLS). A thin layer of 10 nm of transparent silicon nitride was deposited on commercial optical gratings by means of sputtering. The quality of the layer was tested by x-ray photoelectron spectroscopy and atomic force microscopy. As a proof of concept, the sensors were successfully tested with OWLS by monitoring the concentration dependence on the detection of an antibody-protein pair. The potential of the Si3N4 as functional layer in a real-time biosensor opens new ways for the integration of optical waveguides with microelectronics.
Keywords: silicon nitride; optical gratings; waveguide; biosensor silicon nitride; optical gratings; waveguide; biosensor
This is an open access article distributed under the Creative Commons Attribution License (CC BY 3.0).

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Diéguez, L.; Caballero, D.; Calderer, J.; Moreno, M.; Martínez, E.; Samitier, J. Optical Gratings Coated with Thin Si3N4 Layer for Efficient Immunosensing by Optical Waveguide Lightmode Spectroscopy. Biosensors 2012, 2, 114-126.

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