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Optical Gratings Coated with Thin Si3N4 Layer for Efficient Immunosensing by Optical Waveguide Lightmode Spectroscopy
Department of Electronics, University of Barcelona, C/Martí i Franquès 1, Barcelona, ES 08028, Spain
Nanobioengineering Group, Institute for Bioengineering of Catalonia (IBEC), C/Baldiri Reixac 10-12, Barcelona, ES 08028, Spain
Networking Research Center on Bioengineering, Biomaterials and Nanomedicine (CIBER-BBN), C/María de Luna 11, Edificio CEEI, Zaragoza, ES 50018, Spain
Electronic Engineering Department, Universitat Politècnica de Catalunya, Campus Nord, Barcelona, ES 08034, Spain
Current Address: Ian Wark Research Institute (IWRI), University of South Australia, Mawson Lakes Boulevard, Mawson Lakes, SA 5095, Australia
Current Address: Institut de Science et d’Ingénierie Supramoléculaires (ISIS), Université de Strasbourg, 8 allée Gaspard Monge, BP 70028, Strasbourg, Cedex, FR 67083, France
* Author to whom correspondence should be addressed.
Received: 1 February 2012; in revised form: 14 March 2012 / Accepted: 5 April 2012 / Published: 10 April 2012
Abstract: New silicon nitride coated optical gratings were tested by means of Optical Waveguide Lightmode Spectroscopy (OWLS). A thin layer of 10 nm of transparent silicon nitride was deposited on commercial optical gratings by means of sputtering. The quality of the layer was tested by x-ray photoelectron spectroscopy and atomic force microscopy. As a proof of concept, the sensors were successfully tested with OWLS by monitoring the concentration dependence on the detection of an antibody-protein pair. The potential of the Si3N4 as functional layer in a real-time biosensor opens new ways for the integration of optical waveguides with microelectronics.
Keywords: silicon nitride; optical gratings; waveguide; biosensor
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MDPI and ACS Style
Diéguez, L.; Caballero, D.; Calderer, J.; Moreno, M.; Martínez, E.; Samitier, J. Optical Gratings Coated with Thin Si3N4 Layer for Efficient Immunosensing by Optical Waveguide Lightmode Spectroscopy. Biosensors 2012, 2, 114-126.
Diéguez L, Caballero D, Calderer J, Moreno M, Martínez E, Samitier J. Optical Gratings Coated with Thin Si3N4 Layer for Efficient Immunosensing by Optical Waveguide Lightmode Spectroscopy. Biosensors. 2012; 2(2):114-126.
Diéguez, Lorena; Caballero, David; Calderer, Josep; Moreno, Mauricio; Martínez, Elena; Samitier, Josep. 2012. "Optical Gratings Coated with Thin Si3N4 Layer for Efficient Immunosensing by Optical Waveguide Lightmode Spectroscopy." Biosensors 2, no. 2: 114-126.