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Biosensors 2012, 2(2), 114-126; doi:10.3390/bios2020114

Optical Gratings Coated with Thin Si3N4 Layer for Efficient Immunosensing by Optical Waveguide Lightmode Spectroscopy

1,2,†,* , 1,2,3,‡
1 Department of Electronics, University of Barcelona, C/Martí i Franquès 1, Barcelona, ES 08028, Spain 2 Nanobioengineering Group, Institute for Bioengineering of Catalonia (IBEC), C/Baldiri Reixac 10-12, Barcelona, ES 08028, Spain 3 Networking Research Center on Bioengineering, Biomaterials and Nanomedicine (CIBER-BBN), C/María de Luna 11, Edificio CEEI, Zaragoza, ES 50018, Spain 4 Electronic Engineering Department, Universitat Politècnica de Catalunya, Campus Nord, Barcelona, ES 08034, Spain Current Address: Ian Wark Research Institute (IWRI), University of South Australia, Mawson Lakes Boulevard, Mawson Lakes, SA 5095, Australia Current Address: Institut de Science et d’Ingénierie Supramoléculaires (ISIS), Université de Strasbourg, 8 allée Gaspard Monge, BP 70028, Strasbourg, Cedex, FR 67083, France
* Author to whom correspondence should be addressed.
Received: 1 February 2012 / Revised: 14 March 2012 / Accepted: 5 April 2012 / Published: 10 April 2012
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New silicon nitride coated optical gratings were tested by means of Optical Waveguide Lightmode Spectroscopy (OWLS). A thin layer of 10 nm of transparent silicon nitride was deposited on commercial optical gratings by means of sputtering. The quality of the layer was tested by x-ray photoelectron spectroscopy and atomic force microscopy. As a proof of concept, the sensors were successfully tested with OWLS by monitoring the concentration dependence on the detection of an antibody-protein pair. The potential of the Si3N4 as functional layer in a real-time biosensor opens new ways for the integration of optical waveguides with microelectronics.
Keywords: silicon nitride; optical gratings; waveguide; biosensor silicon nitride; optical gratings; waveguide; biosensor
This is an open access article distributed under the Creative Commons Attribution License (CC BY) which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Diéguez, L.; Caballero, D.; Calderer, J.; Moreno, M.; Martínez, E.; Samitier, J. Optical Gratings Coated with Thin Si3N4 Layer for Efficient Immunosensing by Optical Waveguide Lightmode Spectroscopy. Biosensors 2012, 2, 114-126.

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