Perfluoropolyether (PFPE) Intermediate Molds for High-Resolution Thermal Nanoimprint Lithography
Abstract
:1. Introduction
2. Experimental
3. Results and Discussion
3.1. Step 1: PFPE Intermediate Mold Fabrication and Characterization
3.2. Step 2: COC Thermal Nanoimprinting via PFPE Intermediate Molds
4. Conclusions
Author Contributions
Funding
Acknowledgments
Conflicts of Interest
References
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Masciullo, C.; Sonato, A.; Romanato, F.; Cecchini, M. Perfluoropolyether (PFPE) Intermediate Molds for High-Resolution Thermal Nanoimprint Lithography. Nanomaterials 2018, 8, 609. https://doi.org/10.3390/nano8080609
Masciullo C, Sonato A, Romanato F, Cecchini M. Perfluoropolyether (PFPE) Intermediate Molds for High-Resolution Thermal Nanoimprint Lithography. Nanomaterials. 2018; 8(8):609. https://doi.org/10.3390/nano8080609
Chicago/Turabian StyleMasciullo, Cecilia, Agnese Sonato, Filippo Romanato, and Marco Cecchini. 2018. "Perfluoropolyether (PFPE) Intermediate Molds for High-Resolution Thermal Nanoimprint Lithography" Nanomaterials 8, no. 8: 609. https://doi.org/10.3390/nano8080609