Challenges 2012, 3(2), 261-277; doi:10.3390/challe3020261
Abstract

Towards a Casimir Force Measurement between Micromachined Parallel Plate Structures

1,* email, 1email, 1email, 1email, 1email, 1,2email and 1email
Received: 4 September 2012; in revised form: 22 October 2012 / Accepted: 5 November 2012 / Published: 20 November 2012
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Abstract: Ever since its prediction, experimental investigation of the Casimir force has been of great scientific interest. Many research groups have successfully attempted quantifying the force with different device geometries; however, measurement of the Casimir force between parallel plates with sub-micron separation distance is still a challenging task, since it becomes extremely difficult to maintain sufficient parallelism between the plates. The Casimir force can significantly influence the operation of micro devices and to realize reliable and reproducible devices it is necessary to understand and experimentally verify the influence of the Casimir force at sub-micron scale. In this paper, we present the design principle, fabrication and characterization of micromachined parallel plate structures that could allow the measurement of the Casimir force with tunable separation distance in the range of 100 to 1000 nm. Initially, a gold coated parallel plate structure is explored to measure the Casimir force, but also other material combinations could be investigated. Using gold-silicon eutectic bonding, a reliable approach to bond chips with integrated suspended plates together with a well-defined separation distance in the order of 1–2 μm is developed.
Keywords: Casimir force; parallel plate geometry; bulk micromachining
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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MDPI and ACS Style

Nawazuddin, M.B.S.; Lammerink, T.S.J.; Berenschot, E.; Boer, M.D.; Ma, K.-C.; Elwenspoek, M.C.; Wiegerink, R.J. Towards a Casimir Force Measurement between Micromachined Parallel Plate Structures. Challenges 2012, 3, 261-277.

AMA Style

Nawazuddin MBS, Lammerink TSJ, Berenschot E, Boer MD, Ma K-C, Elwenspoek MC, Wiegerink RJ. Towards a Casimir Force Measurement between Micromachined Parallel Plate Structures. Challenges. 2012; 3(2):261-277.

Chicago/Turabian Style

Nawazuddin, Mubassira B.S.; Lammerink, Theo S.J.; Berenschot, Erwin; Boer, Meint D.; Ma, Ke-Chun; Elwenspoek, Miko C.; Wiegerink, Remco J. 2012. "Towards a Casimir Force Measurement between Micromachined Parallel Plate Structures." Challenges 3, no. 2: 261-277.

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