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Journal: Challenges, 2012
Volume: 3
Page(s): 261-277

Article: Towards a Casimir Force Measurement between Micromachined Parallel Plate Structures
Nawazuddin, M.B.S.; Lammerink, T.S.J.; Berenschot, E.; Boer, M.D.; Ma, K.-C.; Elwenspoek, M.C.; Wiegerink, R.J.

http://www.mdpi.com/2078-1547/3/2/261

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