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Appl. Sci. 2017, 7(6), 561; doi:10.3390/app7060561

Waveguiding Light into Silicon Oxycarbide

1
Dipartimento di Elettronica, Informazione e Bioingegneria (DEIB), Politecnico di Milano, via Ponzio 34/5, 20133 Milan, Italy
2
Department of Telecommunications Engineering, Mehran University of Engineering & Technology, Jamshoro 76062, Sindh, Pakistan
*
Author to whom correspondence should be addressed.
Academic Editor: Boris Malomed
Received: 1 May 2017 / Revised: 18 May 2017 / Accepted: 25 May 2017 / Published: 30 May 2017
(This article belongs to the Special Issue Guided-Wave Optics)
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Abstract

In this work, we demonstrate the fabrication of single mode optical waveguides in silicon oxycarbide (SiOC) with a high refractive index n = 1.578 on silica (SiO2), exhibiting an index contrast of Δn = 8.2%. Silicon oxycarbide layers were deposited by reactive RF magnetron sputtering of a SiC target in a controlled process of argon and oxygen gases. The optical properties of SiOC film were measured with spectroscopic ellipsometry in the near-infrared range and the acquired refractive indices of the film exhibit anisotropy on the order of 10−2. The structure of the SiOC films is investigated with atomic force microscopy (AFM) and scanning electron microscopy (SEM). The channel waveguides in SiOC are buried in SiO2 (n = 1.444) and defined with UV photolithography and reactive ion etching techniques. Propagation losses of about 4 dB/cm for both TE and TM polarizations at telecommunication wavelength 1550 nm are estimated with cut-back technique. Results indicate the potential of silicon oxycarbide for guided wave applications. View Full-Text
Keywords: silicon oxycarbide; optical waveguides; optical materials; guided waves; integrated optics silicon oxycarbide; optical waveguides; optical materials; guided waves; integrated optics
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Memon, F.A.; Morichetti, F.; Melloni, A. Waveguiding Light into Silicon Oxycarbide. Appl. Sci. 2017, 7, 561.

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