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Appl. Sci. 2016, 6(7), 204; doi:10.3390/app6070204

Determining the Parameters of Importance of a Graphene Synthesis Process Using Design-of-Experiments Method

1,2
and
1,2,3,4,5,*
1
Center for Reliability Sciences & Technologies, Chang Gung University, 259, Wen-Hwa 1st Road, Kwei-Shan, Taoyuan 33302, Taiwan
2
Department of Electronic Engineering, Chang Gung University, 259, Wen-Hwa 1st Road, Kwei-Shan, Taoyuan 33302, Taiwan
3
Department of Mechanical Engineering, Ming Chi University of Technology, 84, Gongzhuan Road, Taishan, New Taipei City 24301, Taiwan
4
Department of Urology, Chang Gung Memorial Hospital, Kwei-Shan, Taoyuan 33305, Taiwan
5
Institute of Radiation Research, College of Medicine, Chang Gung University, 259, Wen-Hwa 1st Road, Kwei-Shan, Taoyuan 33302, Taiwan
*
Author to whom correspondence should be addressed.
Academic Editor: Philippe Lambin
Received: 23 June 2016 / Revised: 7 July 2016 / Accepted: 8 July 2016 / Published: 14 July 2016
View Full-Text   |   Download PDF [5106 KB, uploaded 14 July 2016]   |  

Abstract

A systematic method to identify key factors that control the synthesis of Physical Vapor Deposition (PVD)-based graphene on copper is necessary for engineering graphene growth. The statistical design-of-experiments method is employed and demonstrated in this work in order to fulfill the necessity. Full-factorial design-of-experiments are performed to examine the significance of the main effects and the extent of the interactions of the controlling factors, which are responsible for the number of layers and the quality of the grown graphene. We found that a thinner amorphous carbon layer and a higher annealing temperature are suitable for the growth of mono-layer/few-layer graphene with low defects, while the effect of annealing time has a trade-off and needs to be optimized further. On the other hand, the same treatment, but with larger annealing times will result in multi-layer graphene and low defects. The results obtained from the analysis of the design-of-experiments are verified experimentally with Raman characterization. View Full-Text
Keywords: amorphous carbon film thickness; annealing; design-of-experiments; factorial design; thermo-mechanical stress amorphous carbon film thickness; annealing; design-of-experiments; factorial design; thermo-mechanical stress
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Narula, U.; Tan, C.M. Determining the Parameters of Importance of a Graphene Synthesis Process Using Design-of-Experiments Method. Appl. Sci. 2016, 6, 204.

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