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Polymers 2016, 8(8), 297; doi:10.3390/polym8080297

Spatio-Temporal Proximity Characteristics in 3D μ-Printing via Multi-Photon Absorption

1
Physics Department and Research Center OPTIMAS, University of Kaiserslautern, 67663 Kaiserslautern, Germany
2
Fraunhofer-Institute for Physical Measurement Techniques (IPM), 67663 Kaiserslautern, Germany
*
Author to whom correspondence should be addressed.
Academic Editor: Shin-ichi Yusa
Received: 15 June 2016 / Revised: 29 July 2016 / Accepted: 3 August 2016 / Published: 10 August 2016
(This article belongs to the Special Issue Three-Dimensional Structures: Fabrication and Application)
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Abstract

One of the major challenges in high-resolution μ-printing is the cross-talk between features written in close proximity—the proximity effect. This effect prevents, e.g., gratings with periods below a few hundred nanometers. Surprisingly, the dependence of this effect on space and time has not thoroughly been investigated. Here, we present a spatial-light-modulator based method to dynamically measure the strength of the proximity effect on length and timescales typical to μ-printing. The proximity strength is compared in various photo resists. The results indicate that molecular diffusion strongly contributes to the proximity effect. View Full-Text
Keywords: 3D μ-printing; direct-laser-writing; photo resist; polymerization 3D μ-printing; direct-laser-writing; photo resist; polymerization
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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Waller, E.H.; von Freymann, G. Spatio-Temporal Proximity Characteristics in 3D μ-Printing via Multi-Photon Absorption. Polymers 2016, 8, 297.

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