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Algorithms 2018, 11(7), 90; https://doi.org/10.3390/a11070090

A Novel Method for Control Performance Assessment with Fractional Order Signal Processing and Its Application to Semiconductor Manufacturing

1
School of Mechanical Electronic & Information Engineering, China University of Mining and Technology, Beijing 100083, China
2
Mechatronics, Embedded Systems and Automation Lab, University of California, Merced, CA 95343, USA
3
Institute of Control and Computation Engineering, Warsaw University of Technology, Nowowiejska 15/19, 00-665 Warsaw, Poland
*
Author to whom correspondence should be addressed.
Received: 15 May 2018 / Revised: 21 June 2018 / Accepted: 24 June 2018 / Published: 26 June 2018
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Abstract

The significant task for control performance assessment (CPA) is to review and evaluate the performance of the control system. The control system in the semiconductor industry exhibits a complex dynamic behavior, which is hard to analyze. This paper investigates the interesting crossover properties of Hurst exponent estimations and proposes a novel method for feature extraction of the nonlinear multi-input multi-output (MIMO) systems. At first, coupled data from real industry are analyzed by multifractal detrended fluctuation analysis (MFDFA) and the resultant multifractal spectrum is obtained. Secondly, the crossover points with spline fit in the scale-law curve are located and then employed to segment the entire scale-law curve into several different scaling regions, in which a single Hurst exponent can be estimated. Thirdly, to further ascertain the origin of the multifractality of control signals, the generalized Hurst exponents of the original series are compared with shuffled data. At last, non-Gaussian statistical properties, multifractal properties and Hurst exponents of the process control variables are derived and compared with different sets of tuning parameters. The results have shown that CPA of the MIMO system can be better employed with the help of fractional order signal processing (FOSP). View Full-Text
Keywords: control performance assessment; fractional order signal processing (FOSP); multifractal detrended fluctuation analysis (MFDFA); semiconductor manufacturing; Hurst exponent control performance assessment; fractional order signal processing (FOSP); multifractal detrended fluctuation analysis (MFDFA); semiconductor manufacturing; Hurst exponent
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).
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Liu, K.; Chen, Y.; Domański, P.D.; Zhang, X. A Novel Method for Control Performance Assessment with Fractional Order Signal Processing and Its Application to Semiconductor Manufacturing. Algorithms 2018, 11, 90.

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