Spectroscopic Study of Plasma Polymerized a-C:H Films Deposited by a Dielectric Barrier Discharge
AbstractPlasma polymerized a-C:H thin films have been deposited on Si (100) and aluminum coated glass substrates by a dielectric barrier discharge (DBD) operated at medium pressure using C2Hm/Ar (m = 2, 4, 6) gas mixtures. The deposited films were characterized by Fourier transform infrared reflection absorption spectroscopy (FT-IRRAS), Raman spectroscopy, and ellipsometry. FT-IRRAS revealed the presence of sp3 and sp2 C–H stretching and C–H bending vibrations of bonds in the films. The presence of D and G bands was confirmed by Raman spectroscopy. Thin films obtained from C2H4/Ar and C2H6/Ar gas mixtures have ID/IG ratios of 0.45 and 0.3, respectively. The refractive indices were 2.8 and 3.1 for C2H4/Ar and C2H6/Ar films, respectively, at a photon energy of 2 eV. View Full-Text
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Chandrashekaraiah, T.H.; Bogdanowicz, R.; Rühl, E.; Danilov, V.; Meichsner, J.; Thierbach, S.; Hippler, R. Spectroscopic Study of Plasma Polymerized a-C:H Films Deposited by a Dielectric Barrier Discharge. Materials 2016, 9, 594.
Chandrashekaraiah TH, Bogdanowicz R, Rühl E, Danilov V, Meichsner J, Thierbach S, Hippler R. Spectroscopic Study of Plasma Polymerized a-C:H Films Deposited by a Dielectric Barrier Discharge. Materials. 2016; 9(7):594.Chicago/Turabian Style
Chandrashekaraiah, Thejaswini H.; Bogdanowicz, Robert; Rühl, Eckart; Danilov, Vladimir; Meichsner, Jürgen; Thierbach, Steffen; Hippler, Rainer. 2016. "Spectroscopic Study of Plasma Polymerized a-C:H Films Deposited by a Dielectric Barrier Discharge." Materials 9, no. 7: 594.
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