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Materials 2016, 9(7), 594; doi:10.3390/ma9070594

Spectroscopic Study of Plasma Polymerized a-C:H Films Deposited by a Dielectric Barrier Discharge

1
Institut für Physik, Ernst-Moritz-Arndt-Universität Greifswald, Felix-Hausdorff-Str. 6, Greifswald 17489, Germany
2
Faculty of Electronics, Telecommunications and Informatics, Gdansk University of Technology, 11/12 G. Narutowicza St., Gdansk 80-233, Poland
3
Institut für Chemie und Biochemie-Physikalische und Theoretische Chemie, Freie Universität Berlin, Takustr. 3, Berlin 14195, Germany
*
Author to whom correspondence should be addressed.
Academic Editor: Lanxia Cheng
Received: 11 May 2016 / Revised: 4 July 2016 / Accepted: 6 July 2016 / Published: 19 July 2016
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Abstract

Plasma polymerized a-C:H thin films have been deposited on Si (100) and aluminum coated glass substrates by a dielectric barrier discharge (DBD) operated at medium pressure using C2Hm/Ar (m = 2, 4, 6) gas mixtures. The deposited films were characterized by Fourier transform infrared reflection absorption spectroscopy (FT-IRRAS), Raman spectroscopy, and ellipsometry. FT-IRRAS revealed the presence of sp3 and sp2 C–H stretching and C–H bending vibrations of bonds in the films. The presence of D and G bands was confirmed by Raman spectroscopy. Thin films obtained from C2H4/Ar and C2H6/Ar gas mixtures have ID/IG ratios of 0.45 and 0.3, respectively. The refractive indices were 2.8 and 3.1 for C2H4/Ar and C2H6/Ar films, respectively, at a photon energy of 2 eV. View Full-Text
Keywords: dielectric barrier discharge (DBD); thin film deposition; a-C:H films; atmospheric pressure; hydrocarbon plasma dielectric barrier discharge (DBD); thin film deposition; a-C:H films; atmospheric pressure; hydrocarbon plasma
This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. (CC BY 4.0).

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MDPI and ACS Style

Chandrashekaraiah, T.H.; Bogdanowicz, R.; Rühl, E.; Danilov, V.; Meichsner, J.; Thierbach, S.; Hippler, R. Spectroscopic Study of Plasma Polymerized a-C:H Films Deposited by a Dielectric Barrier Discharge. Materials 2016, 9, 594.

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